半導體製程設備-濕蝕刻洗淨機台

本技術報告是於頂程國際股份有限公司實習期間內，參與濕蝕刻化學洗淨機台之專案計畫，在計畫內擔任的角色為收集此洗淨機台的硬體設備與電控軟體等相關資料，並整理撰寫完成改造後濕蝕刻化學洗淨機台之人員操作手冊。此次改造機台是利用兩種不同系統的機型結合而成，硬體方面各酸槽區管路重新設計之外，其他設備相關配件替換，並新增部分零件如感測器、槽區快速排除液體裝置及快速補水管路閥件等屬於防護機制的功能性設計，亦針對更換槽體板材進行板材耐化性測試，另一方面，機台控制的軟體技術部分重新編寫難度較高，除了整合整機體的控制指令，亦重新設計操作系統的控制介面，並增加酸槽系統之「一鍵換酸」功能，有利於線上操作員方便且快速的控制洗淨製程步驟。硬體方面針對槽區板材更換材質及供應廠商之考量，而進行新舊板材的耐化性測試，在酸性環境且封閉系統的條件下，控制不同的實驗時間，觀察各實驗板材表面的外觀變化和重量變化，實驗結果顯示，新舊板材表面都出現老化的現象，外觀顏色變深黑色，但表面並無發現有被腐蝕、脆化或裂化等破壞性的跡象，而重量變化於實驗前後亦無明顯的差異，由此實驗結果可提供客戶與廠商作為是否替換槽區板材之參考依據。

關鍵字

濕蝕刻；酸槽；半導體；洗淨

並列摘要

This technical report is about the project plan of a Wet Station during the period of intern of Ding Cheng International Co., Ltd. The work in the project is to assist in the collection of related information such as hardware equipment, electrical control and software of this Wet Station, and to write a manual for the operation of the Wet Station. The equipment improving is based on the combination of two different system models. In terms of hardware, the piping of each acid bath unit is redesigned, and other equipment-related parts are replaced. The addition of equipment components to the machine is a functional design of the protection mechanism such as sensors, quick drain pump, and fast refill water valves in the acid bath unit. In order to replace the bath plate, the chemical resistance of the plate was tested. In terms of software, the software technology part of the computer control is very difficult to rewrite. In addition to integrating the control instructions of the machine, it also redesigned the control interface of the operating system and increased the Chemical Mode Select system's function of rapid acid exchange. These are convenient and quick control process steps for the operator. About the chemical resistance test of new and old plates is based on considerations of material replacement for the acid bath unit and plate suppliers. Experimental plates were placed in an acidic environment and closed system conditions, and the plates were observed for changes in surface and weight after controlling for different experimental times. The experimental results showed that the old and new plate surface appear the phenomenon of aging and the color was darkened. However, there were no signs of destructive corrosion, embrittlement, or cracking on the surface, and there is no obvious difference in weight change. The results of this experiment can provide a reference for customers and vendors as replacement plates.