This study investigates the correlation between cash-related indicators and corporate operating performance in the semiconductor industry in Taiwan, and the correlation between company-specific factors, such as control status, shareholding ratio of controllers and management, internalization position differences, R&D expense rate, and the ratio of directors' and supervisors' compensation and employees' bonuses to net income before tax, on the value of corporate cash holdings. The results of this study show that cash-related indicators are significantly correlated with corporate operating performance in the semiconductor industry in Taiwan. Company-specific factors such as shareholding ratio of controllers and management, internalized position differences, R&D expense ratio, and employee bonuses are all significantly correlated with corporate cash holding value.