使用Fabry-Perot etalon之絕對角度測量儀

Absolute angular instrument using Fabry-Perot etalon

林志鋒(Zhi-Feng Lin)

指導教授 ： 林世聰

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2010年)

https://doi.org/10.6841/NTUT.2010.00030

摘要

本文提出一套使用Fabry-Perot etalon之絕對角度測量儀，它利用Fabry-Perot etalon對入射光角度之超敏感特性來進行量測，它的量測方法又可方為兩個。其一個方法為絕對角度掃描技術，在待測物產生角位移後，Fabry-Perot etalon進行角度掃描來偵測此位移量；在量測過程中，因某因素阻檔到光源時，不須重複歸零校正，只須找到絕對零度即可。第二個方法為即時角度補償技術，當待測物產生角位移，Fabry-Perot etalon立刻進行角度補償，使得Fabry-Perot etalon轉回至位移前的位置，並以此量得角位移量；因其補償速度快於環境所造成的擾動，故可消除環境干擾問題。
我們實際架設出這套測量儀，它的角度量測解析度及靈敏度分別為0.01 arc-sec及19151。當使用角度掃描法時，此測量儀具有0.35 arc-sec的穩定度，而當使用即時角度補償技術進行量測時，此測量儀具有0.34 arc-sec的穩定度。最後我們將這兩種技術進行實驗量測，其結果驗證了它們的正確與可應用性。

關鍵字

Fabry-Perot etalon ； 絕對角度掃描 ； 即時角度補償

並列摘要

A probe based on the use of Fabry- Perot etalon is proposed for absolute angular displacement measurements in this thesis. Two techniques, angular scanning and the real time compensation, are incorporated into the probe. The first technique introduced absolute angular scanning technique. This technique presented the displacement of measured objects. That is, the displacement of measured objects will simultaneously result in the displacement of Fabry-Perot etalon. That is, angular displacement can be figured out after detecting the angular displacement. During the process of measurement, as some factors will block light source, there is no need to repeatedly reset zero correction. All we have to do is to figure out the angle of reset to zero. The second technique introduced the application of the real-time angular compensation. This technique deals with the displacement of objects being measured. That is, the displacement of measured objects. will simultaneously result in the displacement of Fabry-Perot etalon. The process of using the real-time angular compensation technique is that the Fabry-Perot etalon will rotate to the position prior to displacement. Through the control of compensation technique, angular displacement can be figured out. The rate of compensation is much more quickly than the environmental disturbance. Therefore, the environment problems and disturbances can be cleared.

In summary, the resolution and sensitivity of the angular measurement can be figured out by means of setting up the interferometer. The results revealed the resolution and sensitivity of Fabry- Perot etalon are 0.01 arc-sec and 19151, respectively. Moreover, 0.35 arc-sec of stability of the absolute angular scanning was presented. And real-time angular compensation indicated 0.34 arc-sec of stability. Finally, the experimental results demonstrated the validity and applications of absolute angular scanning and real-time angular compensation.

並列關鍵字

Fabry Perot etalon ； absolute angular scanning ； real-time angular compensation

參考文獻

[33] 詹育承，高階共振薄膜出光側視角的研究，碩士論文，元智大學電機工程學系碩士班，桃園，2009。

[2] F. J. Schuda, “High-precision, wide-range, dual-axis, angle monitoring system,”Rev. Sci. Instrum., 54, 1684-1652(1983).

[3] G. G. Luther and R. D. Deslattes, “Single axis photoelectronic autocollimator,” Rev. Sci. Instrum., 55, 747-750(1984).

[5] P. S. Huang, S. Kiyono, and O. Kamada, “Angle measurement based on the internal-reflection effect: a new mehod,” Appl. Opt., 31, 6047-6055(1992).

[6] P. S. Huang and J. Ni, “Angle measurement based on the internal-reflection effect and the use of right-angle prisms,” Appl. Opt., 34, 4976-4981(1995).