退火製程對MgZnO奈米柱的結構與光學特性的影響

The effects of annealing process on MgZnO structure and optical properties

江柏璋(Bo-Chang Ching)

指導教授 ： 洪魏寬

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2010年)

摘要

我們以脈衝雷射鍍法製作氧化鎂鋅殼核結構奈米柱，並量測光致螢光光譜，發現有三個明顯的波峰，分別在2.65eV、3.29eV、3.64eV。一般認為，藍綠光為缺陷光，3.29eV為氧化鋅的近能隙發光，至於3.64eV，我們認為是氧化鎂鋅的近能隙發光。我們亦比較不同的雷射沉積發數，發現殼層的厚度只會改變兩個紫外光的相對強度，不會改變其發光中心的位置。
第二階段我們將成長好氧化鎂鋅殼核結構奈米柱分別通入不同的氣體退火，發現在不同的退火環境將會造成氧化鎂鋅的近能隙發光中心(3.64eV)藍移或紅移，其與氧化鋅(3.29eV)放射峰強度的比值也會改變。
最後我們將266nm脈衝雷射照射在成長好的氧化鎂鋅殼核結構奈米柱，並比較光致螢螢光光譜及電子顯微鏡圖的變化。

關鍵字

奈米柱 ； 氧化鋅 ； 氧化鎂鋅 ； 殼核異質結構 ； 退火 ； 缺陷

並列摘要

Zinc oxide (ZnO) nanorods were coating with the MgxZn1-xO alloy using pulse laser deposition (PLD) method. The photoluminescence spectra at room temperature were measured three different peaks, 2.65eV, 3.29eV, 3.65eV. Generally speaking, the center of peak at 3.29eV was identified in ZnO near band-edge emission. When the pulse laser deposition shot was enhanced, the other UV emission appeared and increased at 3.65eV attributed to the near band-edge emission of MgxZn1-xO-shell/ZnO-core.
Second, Annealing at different surroundings conditions result in blue or red shift of near band-edge emission of MgxZn1-xO-shell/ZnO-core. The relative intensity between ZnO NBE and MgxZn1-xO-shell/ZnO-core would get a variation.
Finally, we use pulse laser to assisted MgxZn1-xO-shell/ZnO-core nanorods, and compare the scanning electron microscope picture and photoluminescence spectra.

並列關鍵字

nanorod ； zinc oxide ； MgZnO ； shell ； anneal ； defect

參考文獻

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