平板型電壓式含氧感測器之製備探討

A study of preparation of planar oxygen sensors

楊晴峰(Ching-Fung Yang)

指導教授 ： 王錫福

國立臺北科技大學/工程學院/材料及資源工程系研究所/碩士(2012年)

摘要

本研究利用刮刀成型法(tape casting process)成功製備平板型電壓式含氧感測器(planar oxygen sensor)之釔安定氧化鋯(4 mol% yttria-stabilized zirconia,4YSZ) 離子導電型電解質層在氧化鋁基板中。此方法之優點在於製程簡單、可製備構造複雜之輕薄元件、可低溫製程及可精密控制元件尺寸。研究中經由控制不同材料、不同固體含量的陶瓷生胚之燒結收縮率以及調整製漿的成分參數，探討4YSZ膜層和氧化鋁基板層之間的匹配性以及對微結構之影響。
首先，利用刮刀成型製備氧化鋁以及4YSZ電解質薄帶，再將兩種薄帶切割成15 mm x15 mm之尺寸，之後用疊壓機疊壓出感測器各層結構要求厚度，其中4YSZ膜層厚度約為50 μm，而氣氛流通用的溝槽層則以雷射切割機製備，解決上述可能產生的匹配性問題後，才可網印白金(Pt)於氧化鋁層上，脫脂燒結後完成含氧感測器之金屬電極。

關鍵字

刮刀成型法 ； 含氧感測器 ； 氧化鋁 ； 離子導電型電解質

並列摘要

In this study, most material of sensor is alumina and the ion-conductive electrolyte layer(4 mol% yttria-stabilized zirconia, 4YSZ) have been successfully made into planar oxygen sensor by tape casting process.
The advantages of this process are : simple, complex and thin structures can be prepared, can be finished at low-temperature and the sensor size can be controlled accurately.
In this study, researching the effect of microstructure and the matching of layers by controlling the ceramic sintering shrinkage of different materials and different solid contents of green tape and by adjusting the composition of ceramic slurries.
First, prepare alumina and 4YSZ electrolyte thin tapes, then cut into 15 mm x15 mm of size, then use the machine pressing these cut green tape to the asking required thickness, the thickness of 4YSZ about 50 μm.The groove layer of sensor is made by laser cutting mechanism and the platinum (Pt) electrodes are made by screen printing.

並列關鍵字

Tape casting ； Oxygen sensor ； Alumina ； Ion-conductive electrolyte

參考文獻

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