平板電壓式氧氣感測器之製備

本研究已成功利用積層陶瓷技術製備並改良平板電壓式氧氣感測器。改良方向主要為減少開機時間、增強氧氣感測器的強度與減少感測器反應時間。開機時間主要受制於加熱電極的加熱速率。本研究成功製備出加熱速率為28.6oC/s的加熱器，可以約22秒加熱到500oC以上，進而減少開機時間。為了增加電解質層與感測器其他層之間的匹配性，而將電解質層配比的4YSZ和 Al2O3體積比例從9比1改為7比3。在電解質層與參考氣體通道層間增加一層結構層可保護電解質層，減少裂縫的產生。而結構層最佳配比的Al2O3和4YSZ體積比例為9比1。其中一支OS-E感測器在低氧分壓氣氛下的訊號強度可達約1 V，但其在低氧分壓與高氧分壓氣氛轉換時的反應時間隨測試循環數增加而增加，且OS-E感測器的良率較差。OS-D感測器在本研究中擁有最好的結構設計，其電解質層沒有裂縫產生，且感測電極良好附著在電解質層上。OS-D感測器的反應時間小於0.8秒，其在低氧分壓氣氛下的訊號強度可達約0.75 V，且訊號穩定性佳、良率佳。故在本研究內，OS-D擁有最佳的性能。

關鍵字

平板電壓式氧氣感測器；加熱電極； 4YSZ ；氧化鋁；積層陶瓷

並列摘要

In this study, planar potentiometric oxygen sensors had been successfully manufactured by multilayer ceramics (MLCs) process. The improvements of this study were reducing starting time, reinforcing the structure, and reducing response time of oxygen sensors. First, the heaters which developed in this study had heating speed about 28.6oC/s. These heaters could heat the sensor up to 500oC in 22 seconds. Therefore, the stating time could be reduced. Second, the electrolyte had been reinforced by changing the composition, increasing the layer’s thickness, and the structural layer. And the most suitable composition for electrolyte and protective insulating layer and structural layer were 30 vol.% of Al2O3 with 70 vol.% of 4YSZ; and 20 vol.% of 4YSZ with 80 vol.% of Al¬2O3, respectively. Third, to reduce the response time, several sensors were compared. One of the OS-E had an intense e.m.f. about 1 V. However, the response time while changing the high O2 concentration into low O2 concentration would decay with time and the yield rate was low. OSs-D had the best design. Because of the electrolyte was free from crack, electrodes and electrolyte had great adhesion. The value of e.m.f. of OSs-D could reach up to 0.75 V at low concentration atmosphere, the response time was 0.8 s, signal was stable, and the yield rate was great. Therefore, OSs-D had the best performance of all sensors that manufactured in the study.

並列關鍵字

Planar potentiometric oxygen sensor ； Heater ； 4YSZ ； Al2O3 ； Multilayer ceramics

參考文獻

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6. Masami Mori, Hiroyuki Nishimura, Yoshiteru Itagaki, Yoshihiko Sadaoka, Enrico Traversa, Detection of sub-ppm level of VOCs based on a Pt/YSZ/Pt potentiometric oxygen sensor with reference air, Sensors and Actuators B: Chemical, vol. 143, 2009, pp. 56-61.

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平板電壓式氧氣感測器之製備

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