偏光式牛頓掃描干涉儀用於光學平面量測

此篇研究提出一套偏光式牛頓掃描干涉儀，用來檢測光學表面。牛頓干涉儀具有共光路、等光程的特點，因此擁有抗震動能力且可結合低同調光源使用。由於此研究結合光學同調斷層掃描技術與牛頓干涉原理，不只提高量測的解析度並且具有量測斷高之能力。此研究之實際架設包含四大模組，分別為光源模組、掃描模組、干涉儀模組、控制與影像系統。在實驗上，分別量測規矩塊與濺鍍機製作出的樣本，作為此干涉儀的應用性與正確性。

關鍵字

牛頓干涉儀；白光；掃描

並列摘要

This research proposes a polarized Newton scanning interferometer capable of examining plane optical surfaces. The characteristics of Newton interferometer are common-path design, equivalent optical-path-length, so they have performance of anti-vibration and they are able to use low coherent light sources. Since it incorporates the technique of optical coherent tomography with the conventional Newton interferometer, it is not only with higher measurement resolution but also with the capability of step-height measurements. The measurement theory is first demonstrated; a setup, which consists of a light source module, the optical path difference scanning module, the proposed interferometer, and a control and image processing system, constructed to realize the proposed interferometer is then described; and the experiments and experimental results are finally presented.

並列關鍵字

Newton interferometer ； White light ； Scanning

參考文獻

1. 黃英碩，「掃描探針顯微術的原理及應用」，科儀新知，第二十六卷，第四期，2005，第7-17頁。

4. 范光照葉易霖，「白光干涉垂直掃描之研究」，中國機械工程學會第二十一屆全國學術研討會論文集，高雄，2004，第1-6頁。

3. S. T. Lin, S. L. Yeh, and M. H. Hxieh, "Broadband light source shearing interferometer using Savart plate and angular scanning technique," Opt., vol. 37, no. 11, 2012, pp.9107-9109.

5. T. Guo, L. Ma, J. Chen, X. Fu and X. Hu, "Microelectromechanical systems surface characterization based on white light phase shifting interferometry," Opt. Eng., vol. 50, no. 5, 2011.

6. Vincent Toal and Brian Bowe, "White Light Interferometric Surface Profiler," Opt. Eng., Vol. 37, no. 6, 1998, pp. 1796-1799.

國際替代計量

偏光式牛頓掃描干涉儀用於光學平面量測

全文下載

主題瀏覽