掃描探針顯微術的原理及應用

Scanning Probe Microscopy: Principles and Applications

黃英碩(Ing-Shouh Hwang)

《科儀新知》 144期 (2005/02) Pp. 7-17

https://doi.org/10.29662/IT.200502.0001

摘要

1980年代初期發明出來的掃描穿隧顯微術，以及日後陸續發展出來的其他掃描探針顯微術(SPM)，提供科學家一個嶄新的能力去觀察、量測、甚至操控奈米級的世界。SPM有一獨特的優點是，藉由選取適當的探針，可探討物質表面上奈米等級的物理及化學性質，目前已有數十種不同的SPM技術，而且新的技術仍不斷開發中。此外，有些原本為SPM而發展出來的技術，已有部分應用到其他用途上，例如高密度儲存元件及高靈敏度生化分子檢測。因此，可以預見SPM對奈米科技將有重大的衝擊。

並列摘要

The invention of scanning tunneling microscopy in early 1980's and the subsequent development of other scanning probe microscopies (SPMs) have provided scientists unprecedented capability to image, to measure, and to manipulate the nano-world. One unique advantage of SPMs is that different physical and chemical properties on surfaces can be studied at the nanometer scale by the appropriate choice of probe tips. Currently there are tens of different SPMs, and many other new probe technologies are under development. Besides, several technologies that were originally developed for SPMs have been found to be very useful for other applications, such as high-density storage drives and high-sensitivity bio-and-chemical sensors. Therefore, it can be expected that SPMs will have great impact on the nanoscience research and nanotechnology.