面板廠單位耗能分析及外氣空調箱節能 設計之研究

Analysis on TFT-LCD Fab. Energy Consumption And Research on Energy Saving Design for Make-up Air Handling Unit

鄧玉星(Yush-Shing Teng)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/冷凍空調工程系所/碩士(2005年)

摘要

本研究以依據台灣面板廠(TFT-LCD)3.5G(代)及5G(代)兩廠不同尺寸生產線的實際量測及調查數據之基準，各別分析建立製程設備及廠務公用系統的單位耗能，計算各系統耗能狀況，探討能源節約及回收之可行性，最後研究外氣之補給量及外氣空調箱運轉系統之最佳化，提供日後節能空調系統設計之依據。
由於隨著面板廠為降低生產成本及擴大產能，投入之母片尺寸日益加大，為符合製程須求，建廠面積越來越大，因此造成所須之空調能源就越來越大，而目前製程須求設計幾乎以設備供應商提供之須求表為設計基準。本研究針對公用系統之空調耗能部分進行計算分析，檢討可節省能源的空間，並提出降低主機系統耗能，改變外氣空調箱(MAU)運轉模式及判斷熱排氣回收狀況之節能方式, 不但降低CO2所造成之環境污染，也使能源利用上更加提高，減少單位耗能之運轉成本，建立最佳能源使用模式及單位元能源指標，在未來各廠再擴建時更可以降低建廠成本及運轉費用，大大提昇面板產業在國際競爭力。

關鍵字

面板廠(TFT-LCD) ； 單位耗能指標 ； 節能設計 ； 外氣空調箱(MAU)

並列摘要

In order to provide the data for HVAC design energy saving for future, this study is based on the actual measurement and survey from different sizes of product line in Taiwan TFT-LCD 3.5G & 5G plant to establish and analysis the unit consumption of process equipment & plant utility system, to calculate different system consumption situation, to research the possibility and the best situation for MAU supply amount and operation system.
Reduce the product cost and expands the production of TFT-LCD plant, the size of board is getting bigger. For process request, the area for new plant is getting bigger and the energy consumption is increaseing. Currently, the design is usually based on the equipment demand sheet provided by the suppliers. This study focuses on part of HVAC consumption to calculate, analysis and to discuss the possibility of the energy saving space. It also provides the way to lower the energy consumption of chiller system and improve the MAU operation model and to judge the way of energy saving for heat exhaust recovery situation. It will decrease the environment pollution caused by CO2 and also enhance the efficiency of energy consumption and lower down the operation cost of unit consumption. This study also can establish the best model of energy utilization and the key way of unit energy for future plant expasion, which can lower the plant and operation cost to increase the ability of National competition of TFT-LCD after all.

並列關鍵字

TFT-LCD ； Energy Comsumption ； Saving Energy ； Make-up Air Handling Unit

參考文獻

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