週期性結構薄膜與光學特性探討

The Periodic Structures Thin Film and Optical Properties

來子玠(Zih Jie Lai)

指導教授 ： 任貽均

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2008年)

摘要

本論文使用二氧化鈦材料以電子鎗方式製程，探討當結構隨著縮短週期厚度而轉變時，光學現象的變化情形。以下探討兩種週期性類型:
1.利用交錯沈積方式製鍍出鋸齒狀薄膜，當結構隨著掃描週期減少到臨界點時，鋸齒狀結構將趨近於垂直基板的交錯沈積柱。交錯沈積薄膜在光學上有雙折射現象，當光垂直入射於薄膜，它的光學路徑隨S、P偏振態而改變。將這結構整合到Fabry-Perot當中，將有助於觀察非均向薄膜光學特性的相位延遲。
2.利用斜向沈積方式在基板旋轉下製鍍出螺旋狀薄膜，當結構隨著旋轉速度增加到臨界點時，螺旋狀結構將趨近於柱狀結構。螺旋狀薄膜在光學上有布拉格反射現象，當光垂直入射於薄膜，特定波長下，它的光學路徑隨左、右旋光而改變。

關鍵字

鋸齒狀薄膜 ； 雙折射 ； 螺旋薄膜 ； 偏極光

並列摘要

In this study, the anisotropic TiO2 films were evaporated using an electron-beam. The optical properties of the film with the decreasing pitch period have been investigated. Two kinds of fabrications are presented below:
1. The zigzag thin films are fabricated using glancing angle bideposition technique. As the period of the structure sweep is reduced to below a critical value, the zigzag structures would be restricted to pillar along the substrate normal direction. The bideposited film have birefringence and the optical path for a ray normal incident on the film is linear polarization dependent. Arranging the bideposited film in the Fabry-Perot configuration would help us in observation of phase retardation caused by the anisotropic optical property of the film.
2. The helical thin films are fabricated using glancing angle deposition technique and the substrate rotation. As the velocity of the structure rotate is increased to below a critical value, the helical structures would be restricted to pillar structures. The helical film have Bragg reflection and the optical path for a ray normal incident on the film is circular polarization dependent.

並列關鍵字

zigzag thin-film ； birefringence ； helical thin-film ； polarized light

參考文獻

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