- 學位論文
雙頻雷射干涉儀在旋轉體之運動量測
The Measurement of Rotating Object by Dual-Frequency Laser Interferometer
摘要
近年來國內外許多的研究單位與廠商大舉投入新世代光碟機DVD的研製。在研發與生產光碟機的過程中，常需深入探討關鍵零組件－主軸馬達，在承載光碟片的動態特性檢測。基於這一理由，本文提出一套雷射干涉儀的架設，目的在可即時地量測光碟片動態軸向偏擺、角位移、與直流伺服馬達主軸的軸向偏擺、軸向角位移、及徑向偏位移檢測。 比起傳統架設，本干涉儀在軸向偏擺及角位移的量測靈敏度為其兩倍，且對受測體角度變化範圍有更大接受度，因此大幅度提升量測的便利性。在外差光源的部份採用具有穩頻技術的齊曼雷射，以降低干涉儀的體積並提高量測便利性。有關本文之學理推導在本文中有詳細說明，且也以實驗來證明其可應用性。
並列摘要
The digital versatile disks (DVD) have the advantages of high speed, high data density, and easy storage. They are thus received more and more interesting in research, development, and menufacture recently. The key components of a DVD system are the disk and the spindle motor adopted for rotating the disk, and the performance of a DVD system is determined by the dynamic behavior of these two components. Because of this, this thesis develops a laser interferometic system for measuring the axial runout and tilt of a rotating disk and the axial runout, tilt, and radial runout of the spindle of a motor. The principle and the advantages of the interferometic system are described. Its applications in detecting a rotating disk and spindle motor are presented. The results agree the validity, advantages, and applicability of the proposed interferometer.