- 學位論文
利用單晶片控制往復式載台系統合成大面積奈米鑽石薄膜之研究
A Study of Synthesis Large Area Nano Crystalline Diamond Films by Reciprocating Carrier System Using Single-Chip Microcomputer Controller
摘要
本論文使用自組裝之微波電漿噴射化學氣相沉積系統配合自行設計的升降載台，來合成平滑且低粗糙度之大面積奈米鑽石薄膜，並於此真空系統內利用機械運動引入的方式，將馬達直線及旋轉運動導入系統內，再利用速度控制往復行程以得到均勻之奈米鑽石薄膜。而本真空系統之往復式載台能以動態方式成長大面積奈米鑽石薄膜鍍膜，並利用微電腦單晶片89S51作為主控器，搭配CNY70光耦合感測器調整馬達之轉速，並以此真空系統之移動載台，探討合成大面積奈米鑽石薄膜各區域之變化形式。 本論文首先使用超音波震盪法混合奈米鑽石粉末以及金屬粉末（Ti、Al）以促進鑽石薄膜的成核，以降低合成奈米鑽石膜之表面粗糙度。結果顯示，在不同金屬粉末混合鑽石粉末溶液所做之前處理，能有效的提高鑽石薄膜的成核密度以及降低表面粗糙度TiD(~13 nm) < AlD(~15 nm) < DP(~17 nm)。 由研究結果顯示在較低基材移動轉速（48 rpm）下，其厚度最厚。而利用不同區域不同轉速控制往復式載台可縮小其鍍膜所造成厚度不均差距（48 rpm + 72 rpm、48 rpm + 96 rpm），最後利用不同轉速加上時間延遲（48 rpm + 5秒延遲、48 rpm + 10秒延遲）可得到大面積奈米鑽石膜之均勻厚度。
並列摘要
In this study, smooth and uniform large area nanodiamond thin film (NCD) were synthesized by using home-made microwave plasma jet chemical vapor deposition (MPJCVD) system with mechanical feed through. Linear motion reciprocating carrier, which used microcomputer single-chip to control the motor speeds, was added into MPJCVD system. The CNY70 photosensor was employed as a switch to change the different speeds which ensure uniform NCD films growth. Finally, the regional larger NCD film’s variations by reciprocating carrier system have been investigated. The ultrasonication pretreatment processes were used with nanodiamond powder mixture nanoametal powder solutions (Ti, Al) which aim to reduce the NCD films surface roughness. Both TiD and AlD pretreatment processes have significantly enhanced the formation of NCD films nuclei and lower surface roughness. From obtained results, lower reciprocating speed (48 rpm) was insured highest thickness. Moreover, through using various speeds for different areas could reduce the non-uniform large area NCD films thickness. The SEM results of as-grown large area NCD films revealed that highest uniform were attain at higher reciprocation speed (96 rpm) and 10 second of delay time.