無塵室排氣系統能量回收第二定律分析

Second-Law Analysis for Energy Recovery of Cleanroom Exhaust System

高文振(Wen-Chen Kao)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2009年)

摘要

自工業革命以來，全球化石能源的使用與日俱增，因化石能源的使用，產生大量二氧化碳，造成溫室效應，由於化石能源蘊藏量有限，且受人為操縱等因素影響，我國99%能源仰賴進口，基於能能源安全及環境保護，節能減碳成為當今熱門議題。
半導體製造為耗能產業，其中無塵室耗能佔相當大的比例，值得做節能探討，由於無塵室之排氣系統具有能量回收的潛力，經由熱力學第二定律分析，在已知冷熱側進口溫度、流量及熱交換器尺寸下，推導直接回收式熱交換器不可逆性最小之方程式，找出熱交換器最佳化設計，並與現今常用之遞迴式(run-aruond coil)系統做比較。
直接回收式熱交換器因為能量損耗能少，不可逆性較小，熱交換器有效度及第二定律效率較遞迴式佳，可應用於電子廠無塵室節能使用。

關鍵字

無塵室 ； 排氣系統 ； 能量回收 ； 可用能 ； 第二定律分析

並列摘要

Every since the industrial revolution, the fossil energy has become the dominated source of global energy. On the flip side, this type of energy produces large amount of carbon dioxide which has been know as the main cause of global warming that has greatly damaged our living environment.
In Taiwan, over 99% of energy solely depends on importing fossil energy. And, due lack of regulation and over usage of the energy, the concern of environmental damage and safety has made "Energy Saving" become a popular topic today.
Particularly in semiconductor fabrication which is one of the large fossil energy consumption industrial segment in Taiwan. For environmental protection and safety reasons, we absolutely need to find a more effective method to improve the efficiency of energy usage. Based on the second-law of thermodynamic, we conclude that we can design a high efficiency heat exchanger by deriving the lowest irreversibility from “direct recycling heat exchanger (DCHC)” with cold/hot intake temperature, flow rate, and capacity of heat exchanger. The heat exchanger design can be directly competed with run-around coil system that is popular used today.
Since the direct recycling heat exchanger has less energy dissipation, lower irreversibility, better heat exchange effectiveness, higher second-law efficiency than run-around coil, DCHC can be an excellent "green power" mechanism to be used in semiconductor cleanroom.

並列關鍵字

cleanroom ； exhaust ； energy recovery ； availability ； second-law analysis

參考文獻

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