電子廠外氣空調箱冰水盤管設計及熱交換之評價研究

The Assessment of the Cooling Coils Design and Heat Exchange of the Makeup Air Unit used in Electronic Industry

陳嬿如(Yen-Ju Chen)

指導教授 ： 蔡尤溪

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2011年)

摘要

外氣空調箱(MAU)之關鍵在於利用數道冰水盤管，達到冷卻除濕大量外氣的目的。本研究以達到潔淨室空氣露點要求下，藉由冰水盤管模擬程式，模擬並探討冰水盤管的設計，在改變冰水供水溫度、盤管側之冰水迴路串聯及並聯模式與不同鰭/管數的組合下，影響水側系統端冰水主機、冰水泵與風側風機的耗能差異，並進一步評價其成本及效益。
研究發現在水路並聯模式下僅改變冰水供水溫度時，每升高1℃，水側系統端的冰水主機、冰水泵的耗能下降7.3%，風側風機耗能提高6.1%，但總體耗能下降6.7%。若是改由雙溫供水，則水側冰水主機、冰水泵的耗能較單溫供水下降30.5%，風側風機耗能提高28.4%，總體能耗下降26.4%。然而將水路改為串聯模式時，水側的耗能較單溫並聯模式下降9.9%，風側耗能提高39.9%，其總體耗能也較單溫並聯模式下降6.4%，但盤管的成本串聯卻較並聯模式提高了15%。在更進一步讓冰水主機側水量固定下與並聯模式做比較，水側的耗能下降31.4%，風側耗能下降11.9%，而總體耗能下降有30.5%，但盤管成本卻增加了30%之多。因此就本研究模擬結果可知相同的冰水盤管，若僅僅改變水路模式，則並聯的盤管能力優於串聯有1.12倍，除非改變盤管內部水路的行走模式。如果以能符合電子廠環境溫、濕度需求來做比較，純粹單溫冰水系統其冰水主機提供的溫度越高，總體耗能越低。若將總體耗能、盤管成本同時納入考量，其最適化的模式為12℃/5℃的雙溫冰水並聯模式。

關鍵字

外氣空調箱 ； 盤管設計 ； 熱交換 ； 水路並聯 ； 水路串聯

並列摘要

Makeup air unit (MAU) uses a series of cooling coils for cooling and removing water vapor from the makeup outdoor air. This study uses heat exchanger computer modeling to study the cooling coil design, the chilled water supply temperature, the parallel and series designs of the water loop for two cooling coils. The above variations are investigated for the effects on the energy use of chillers, chilled water pumps, and also supply fans. The total performance and cost effectiveness is assessed under the conditions of satisfying the dew point requirements of clean room operation.
It has been found that under parallel flow an increase of 1℃ for chilled water would cause a 7.3% decrease of energy use for the water side, 6.1% for the airside, and 6.7% for the system as a whole. With two different temperatures of chilled water design is used, energy saving for the water side is 30.5%, 28.4% for the airside, and 26.4% for the system as a whole. However when series flow is used the energy use for the water side reduces by 9.9% compared to single temperature paralle flow, but the fan energy increases by 39.9%. As the whole the energy use reduces by 6.4%. However the cost of the coils would increase by 15%. Further when equal chilled water flow rate is used, energy use reduces by 31.4% and 11.9% respectively for the water side and the airside, and 30.5% for the total system. In this case the cost of the coils would increase by about 30%. In comparison parallel flow increases the coil capacity by 1.12 times. Total assessement of cost effectivenss gives the 12℃/5℃parallel flow design a higher merit.

並列關鍵字

makeup air unit ； cooling coil design ； heat exchange ； parallel water loop ； series water loop

參考文獻

[4] 陳良銅、王文博，「電子廠外氣空調箱可能與可行之節能方式」，冷凍與空調雜誌，第9期，June 2001，P80~91。

[6] 陳良銅、王文博，「電子廠雙冰水溫度系統節能分析」，冷凍與空調雜誌，第7期， FEB 2001，P78~90。

[7] 陳良銅、王文博，「外氣空調箱設計與風車配置特性」，冷凍與空調雜誌，第8期，2001，P92~101。

[16] 曹智明，「高科技廠房空調系統節能策略之研究」，碩士論文，May 2009，P74~75。

[1] S.C. Hu and Y.K. Chuah，“Power Consumption of Semiconductor Fabs in Taiwan”，Energy， Vol. 28，2003，pp 895-907。