本研究係以溶膠凝膠法製備成長奈米碳管所需之觸媒,並以微波電漿化學氣相沈積系統成長奈米碳管。研究中改變溶膠凝膠法中Fe(NO3)3•9H2O含量探討不同觸媒對成長奈米碳管之影響。其次以一參數調配觸媒可成長出準直性且圓柱狀奈米碳管。最後改變旋轉塗佈轉速,探討旋轉塗佈轉速對於成長奈米碳管之影響。利用電子掃描顯微鏡、穿隧式電子顯微鏡、拉曼光譜和場發射量測儀器,針對所成長之奈米碳管進行表面形貌、微結構與場發射特性進行探討。 實驗結果顯示隨著溶膠凝膠溶液中硝酸鐵含量的提高,所成長之奈米碳管其幾何型貌由平板式奈米碳管轉變為島狀甚至是圓柱狀,達到類似選區效果。其次以硝酸鐵0.6 g、去離子水0.15 g、四丁基鈦酸 0.5 g和正丙醇 3 g可確實成長出具有準直性且為選區圓柱狀之奈米碳管,並改變旋轉塗佈參數成長奈米碳管,發現當轉速降低所成長之奈米碳管圖案其直徑會變大,其中以轉速1000 r.p.m.合成之奈米碳管其起始電場為0.69 V/μm最佳,可應用於場發射元件。
The study is based on sol-gel method to grow carbon nanotubes by MPCVD system to discuss the relationship between FeN3O9 concentration of sol-gel solution and as growth carbon nanotubes. Second, finding out that the parameters of sol-gel solution is able to growth aligned and cylinder-like carbon nanotubes bundle. Finally, changing the rotation speed of spin-coating can treat the size of cylinder-like carbon nanotubes bundle. By using SEM, TEM, Raman spectrum and filed emission system to investigate the carbon nanotube morphology, characteristic and filed emission properties. The result shows that as the Fe(NO3)3•9H2O concentration of sol-gel solution increase, the morphology of carbon nanotubes changes from planar to island-like, even cylinder-like. Second, using 0.6 g Fe(NO3)3•9H2O, 0.15 g D.I. water, 0.5 g Ti[O(CH2)3CH3]4 and 3 g C3H7OH as catalyst is able to form aligned and cylinder-like carbon nanotubes. As change spin-coating rotational speed synthesis in carbon nanotubes experiment, the size of carbon nanotubes bundle reduce as the rotational speed increase. As the rotational speed is 1000 r.p.m., the turn-on electric field has lowest which about is 0.69 V/μm.