絕緣高導熱氮化鋁粉體之製程技術開發研究

Process Technology of High Thermal Conductive and Electrical Insulating AlN Powder

陳麗卿(Li-Ching Chen)

指導教授 ： 蔡德華副教授

國立臺北科技大學/工程學院/化學工程研究所/碩士(2014年)

摘要

本研究以高溫氧化法將氮化鋁粉體在750、850、950、1050及1150℃溫度下，穩定通入流動氧氣，並持溫1~8小時，以便在氮化鋁粉末表面形成氧化鋁層以抵抗水解。研究發現氮化鋁粉體經1050℃以上溫度，通氧氣持溫2小時以上之高溫氧化後，其所表現的抗水解能力最佳。
本研究將氮化鋁粉末分別進行乾壓成形、壓濾成形及刮刀成形生胚，在1800及1850℃、持溫3小時條件下進行燒結，並測量其燒結密度，以及燒結後氮化鋁的熱傳導率。實驗結果顯示：乾壓成形、壓濾成形及刮刀成形，其燒結體平均密度最高分別為3.33 g/cm3、3.26 g/cm3及3.24 g/cm3。另一方面，1850℃壓濾成形試片燒結體所獲得的熱傳導率可達197.40 w/m?K。本研究將抗水解佳的粉體，利用壓濾成形法製成三點抗彎試驗試片，進行燒結件之機械強度試驗，獲得最佳平均破壞強度為298.11 MPa。

關鍵字

熱傳導率 ； 燒結 ； 高溫氧化法

並列摘要

In this study, using the high temperature oxidation at a temperature of 750℃, 850℃, 950℃, 1050℃ and 1150℃, passing the oxygen flow into the aluminum nitride powder stably and keeping the temperature for 1 ~ 8 h, so that the alumina layer form on the surface of the aluminum nitride powder to resist hydrolysis. The study found that the aluminum nitride powder will show their best performance of hydrolysis resistance by holding the temperature at 1050℃ for 4 hours through the oxygen temperature oxidation.
The study of aluminum nitride powder, using the dry pressing, the tape casting and the wet molding method to get the green-body, sintering under the conditions of keeping the temperature at 1800 and 1850℃ for 3 hours, measuring the sintered density and the thermal conductivity of the sintered aluminum nitride. The experimental results showed that the average sintered density of dry pressing, wet molding and tape casting would have the highest value of 3.33 g/cm3, 3.26 g/cm3 and 3.24 g/cm3, respectively. The thermal conductivity of 1850℃ sintered test pieces obtained by wet molding up to 197.40 W/m?K. The study conducts the mechanical strength test of the specimens of sintered parts by using the wet molding method to make the three-point bending test specimens under the best condition of anti-hydrolysis, and gets the best average breaking strength of 298.11 MPa.

並列關鍵字

Thermal conductivity ； Sintering ； High temperature oxidation

參考文獻

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