RF磁控濺鍍製程電漿模擬與PCBN刀具沉積DLC膜之研究

Deposition of Diamond-like Carbon Films on PCBN by R.F. Magnetron Sputtering and Simulated with CFD

張建國(Chiean-Kuo Chang)

指導教授 ： 林啟瑞 ； 蘇春熺

國立臺北科技大學/機電學院/機電整合研究所/碩士(2006年)

摘要

本論文之研究是利用RF磁控濺鍍法，在PCBN刀具上披覆類鑽碳膜及Me-DLC膜。並藉由CFD®-ACE (Computation Fluid Dynamics)軟體，模擬二維濺鍍槍模組。其中以RF功率、靶材及工作壓力等製程條件作為模擬製程參數。在模擬過程中也配合PCBN刀具實務披覆類鑽碳膜，作為模擬之診斷結果。多晶立方氮化硼(Poly-crystalline cubic Boron Nitride 或 PCBN)是由CBN微粉在高壓下燒結成塊而成，其應用加工業之刀具的切刃。PCBN刀具的加工精度可優於1 μm，而其加工的面粗糙度更可低於0.2 μm。因此PCBN刀具為精密加工的極品。
利用類鑽碳膜之高硬度、高熱傳導率及低摩擦阻力等特性，提高PCBN刀具之抗磨耗性及硬度，以延長使用壽命。其中對於消除鍍層與基材間過大的硬度差異或提高鍍層與基材之間附著性，而利用金屬材料（Cr、Ta及Nb）進行沉積在薄膜與基材之間。
本研究中發現在PCBN刀具表面所披覆之類鑽碳膜可降低表面粗糙度（Ra=43.8 nm）及提高硬度，且經由廠商實刀測試結果報告。在進刀量 0.2 m/min及切削速度 600 m/min條件下，未鍍膜與鍍膜的切削距離分別為18920 mm及19425 mm，其中鍍膜製程參數為Ar流量16 sccm及R.F.功率300 W。

關鍵字

PCBN刀具 ； 類鑽碳膜 ； 電漿模擬

並列摘要

The study is made by Diamond-like Carbon (DLC) and Me-DLC films on Poly-crystalline cubic Boron Nitride(PCBN) using R.F. magnetron sputtering method. The magnetron cathode module of R.F. magnetron sputtering system was simulated by CFD®-ACE under various conditions. This research found that the model result was modified as compared with the experimental measurement. In this work, many experiment operation parameters, which are R.F. powers, operaion pressures, and various target compositions, were used to design the thin film by using CFD® -ACE simulation assistant with the plasma sputtering technology. CBN sintered body means polycrystalline CBN. The development of tool material-PCBN, has made it possible to use turning. PCBN is used an accurate cutting tool for removing material from a workpiece. The machining accuracy of the cutter can be less than 1μm, and the surface roughness of its processing can be less than 0.2μm. So PCBN is to process the best.
Diamond-like carbon film has better hardness, thermal conductivity, and lowest friction coefficient. Studies of chromium, tantalum, and niobium as interlayer between DLC films and PCBN, to improve adhesion ability and reduce interlay stress. In particular it relates to a coated PCBN cutting tool improved in wear-resistance and hardness.
The cutting test for feed rate will be 0.2 m/min and cutting speed will be 600 m/min, on the CNC lathe with a PCBN. The cutting distance of non-coating is 18920 mm. The cutting distance of coating is 19425 mm, for DLC films prepared under a inlet Ar of 16 sccm and a radio frequency (R.F.) power of 300 watts. The obtained films have an high hardness and roughness of less than 43.8 nm.

並列關鍵字

PCBN(Poly-crystalline cubic Boron Nitride) ； DLC (Diamond-Like Carbon) ； CFD(Computation fluid dynamics)

參考文獻

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