晶圓廠自動化物料搬運系統交通管制之研究

隨著晶圓技術的進步，晶圓面積、重量的增大、高生產效率和對潔淨度的要求，使自動化物料搬運系統（Automated Material Handling System，AMHS）在半導體廠內顯得格外重要。在越來越仰賴全自動化物料搬運設備的同時，為了要使自動化物料搬運系統在執行搬運的過程更安全，以避免搬運設備在搬運的過程中產生碰撞，而影響整個系統的運作，嚴重甚至會造成整個產線的停擺，故本研究在指派車輛的組合中加入防撞機制的控制策略，以提升自動化物料搬運系統的可靠度及安全性。本研究透過模擬系統來建構搬運設備在晶圓廠搬運的情形，並設計無防撞機制、設立避讓機制和交通控制模式三種情境，來分析在搬運過程中有無防撞機制對生產系統效能差異的影響。由模擬實驗結果顯示產品在製造的過程中，若在越後段製程發生碰撞，平均流程時間將大幅提升，所造成的損失越大，所需花費重製的時間跟成本也越高，因此防撞機制在越後段製程其重要性越顯著，故當晶圓製程越繁雜、生產步驟越多時，設立防撞機制的必要性也越高。防撞機制在整個自動化物料搬運系統扮演著很重要的角色，建構一套良好的防撞機制，可以提高整個搬運系統的可靠度和安全性，亦可降低不必要的損失。在防撞機制的模式下，可以讓整個自動化物料搬運系統得以順暢的運作，降低等待搬運的時間，進而提升整體搬運系統的效率。

關鍵字

自動化物料搬運系統；防撞機制；模擬；派工

並列摘要

Because of the market competition and the progression of manufacturing technology in improving process technology and increasing wafer size, the automated material handling system (AMHS) plays an extremely important role in a 300mm semiconductor wafer fabrication. In order to make safer and avoid the transported process conflicting with the enhancement of the reliability and security of AMHS, we add anti-collision mechanism in the dispatching rules. We use a simulated model to simulate transport condition in Fab and design of three scenarios with no avoiding, by-passing and traffic control to analyze the performance in using the anti-collision mechanism or not. If transport equipment collides with the back-end processing, the average flow time will be significant increased in the simulation results. Therefore, anti-collision mechanism is vital in the back-end processing. To sum up, the anti-collision mechanism plays a very important role in automated material handling system. The construction of an adaptive collision avoidance mechanism can improve the reliability and security of entire transport system, as well as to reduce unnecessary losses. It can make AMHS operation smoothly, reduce the waiting time, and further enhance the efficiency of the whole transport system.

並列關鍵字

Automated Material Handling System (AMHS) ； anti-collision mechanism ； Simulation ； Dispatching

參考文獻

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[43] 林俊甫，以模擬實驗方式探討晶圓廠之最佳經濟規模，碩士論文，國立台灣大學機械工程學研究所，2006。

[44] 游竣安，自動化物料搬運系統在晶圓製造廠之應用，碩士論文，中原大學工業工程學系，2001。

[45] 李雨庭，半導體晶圓廠自動物料搬運系統之設計，碩士論文，中原大學工業工程研究所，2001。

[1] Lin, J.T., Wang , F.K., Chang, Y.M., “A hybrid push/pull-dispatching rule for a photobay in a 300mm wafer fab”, Robotics and Computer-Integrated Manufacturing, vol.22, pp.47-55, 2006.

國際替代計量

晶圓廠自動化物料搬運系統交通管制之研究

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