- 學位論文
磁控濺鍍鉻鋁矽氮化物薄膜於鋁合金壓 鑄用模具鋼上之製程探討與性質研究
Process and Property investigations of Cr-Al-Si-N coating on the tool steel for aluminum die casting by pulsed DC magnetron sputtering
摘要
本研究在工具鋼H13 表面，用脈衝直流磁控濺射沉積系統鍍製四種不同的鉻 鋁矽氮化物(CrAlSiN)薄膜，矽含量分別為(1.6%、4.4%、7.5%、10.8%)的薄膜，薄 膜的結晶結構以低掠角X 光射線繞射儀鑑定，薄膜的表面與橫斷面形貌以場發射 掃描式電子顯微鏡觀察；本研究再利用壓痕儀進行薄膜的硬度與楊氏係數測量， 鍍膜的附著性與耐磨性分別使用刮痕試驗機、HRC-DB 與磨耗試驗機測試，並且 透過鋁合金融湯680℃浸泡試驗來檢測鍍製於工具鋼H13 薄膜的抗熱侵蝕與抗沾 粘性。由實驗結果發現，鉻鋁矽氮化物薄膜的顯微結構與機械特性受矽含量所影 響，鉻鋁矽氮化物(CrAlSiN)薄膜的晶粒尺寸隨矽含量增加而減小，工具鋼H13 的 鉻鋁矽氮化物(CrAlSiN)鍍膜的耐腐蝕藉由在攝氏680℃下浸泡在A380 鋁合金液中 持續2、4、6 小時進行比較，分析鍍層的表面與橫切面。而結論是在熔融A380 鋁 合金液中的耐腐蝕性和矽(Si)的含量有相關性的影響。
並列摘要
In this study, the surface coatings used different Si content respectively(1.6 %，4.4 %，7.5 %，10.8 %). Coatings were fabricated on the H13 tool steels by pulsed DC magnetron sputtering systems,. The crystalline structure of thin film was determined by glancing angle X-ray diffractmeter (XRD). The surface and cross-sectional morphologies of thin films were examined by a field emission scanning electron microscopy (FE-SEM). The hardness and Young's modulus of thin film were evaluated by a nanoindenter. The adhesion and tribological properties of coatings were determined by the scratch tester and pin-on-disk wear tester, respectively. It was found that the microstructure and mechanical properties of CrAlSiN thin films were influenced by the silicon content. The grain size of CrAlSiN thin film decreased with increasing Si contents. The anti-corrosion performance of CrAlSiN coated H13 tool steels were evaluated by immersion in molten A380 aluminum alloy at 680℃ for 2, 4 and 6 hrs. The surface and cross-sectional morphologies of aluminum dipped coatings were further examined. It was concluded that the Si had relative influences on the corrosion resistance in molten A380 aluminum alloy。