銀-介質奈米陣列薄膜之光學特性 量測與分析

Optical property of a silver-dielectric Nanorod array : measurement and analysis

洪健哲(Jian-Jhe Hong)

指導教授 ： 任貽均

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2013年)

https://doi.org/10.6841/NTUT.2013.00483

摘要

本研究利用電子束蒸鍍系統與斜向角度沉積技術(GLAD)，製鍍介質非均向薄膜於銀斜柱陣列之下，並觀察介質非均向薄膜表面孔隙結構對銀奈米陣列薄膜生長之影響以及整體光學特性包含反射、穿透與吸收的影響。參數上，固定介質層(介質層分別為五氧化二鉭與二氧化矽)之厚度、調整銀層厚度，製作出厚度不同的樣品，分析並討論隨著銀層厚度增加之光學特性。

關鍵字

角度沉積技術(GLAD) ； 銀奈米陣列

並列摘要

In this work, the silver-dielectric Nanorod array films are deposited using Glancing Angle Deposition Technique with azimuthal rotation during electron beam evaporation for observing the impact of the surface structure of the dielectric anisotropic thin film on the growth of the silver nanorod array film and overall impact on optical properties including reflection, transmission and absorption.
As for the parameter, we produce samples with different thickness by fixing the thickness of dielectric layers which are Tantalum pentoxide and Silicon dioxide respectively and adjusting the thickness of silver layer for analyzing and discussing the optical properties with the increase of the thickness of silver layer.

並列關鍵字

Glancing Angle Deposition Technique ； silver Nanorod array

參考文獻

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