鋁奈米柱陣列-介質種子層薄膜微觀結構與光學特性探討

Nano-structure and optical property of an aluminum nanorod array upon a seed layer

黃奕誠(Yi-Cheng Huang)

指導教授 ： 任貽均

國立臺北科技大學/電資學院/光電工程系研究所/碩士(2014年)

摘要

本論文，以斜向角度沉積技術，於基板表面製鍍五氧化二鉭直柱陣列，做為種子層。再於五氧化二鉭種子層頂端，斜向沉積鋁奈米斜柱陣列。由於，種子層的競爭效應與成核分佈，有效降低鋁奈米斜柱陣列的填充因子。此外，藉由種子層，改變金屬奈米斜柱陣列的結構參數：直徑、柱狀傾角與孔隙率。並分析與討論，相異結構參數的金屬奈米斜柱陣列，所呈現的光學特性。

關鍵字

鋁奈米柱陣列 ； 斜向角度沉積技術 ； 種子層 ； 填充因子

並列摘要

In this work, an upright Ta2O5 nanorod array is grown first as a seed layer, and the further glancing deposited aluminum is then grown on the top of Ta2O5 nanorods. Owing to the distribution of the seed layer, the filling factor becomes lower than that of a single aluminum nanorod arrays on a bare and smooth substrate. In addition, we apply seed layers to change the characteristics of the metal nanorod arrays including diameter, tilt angle and porosity. The difference of optical properties between aluminum nanorod arrays is analyzed and discussed here.

並列關鍵字

aluminum nanorod array ； glancing angle deposition ； seed layer ； filling factor

參考文獻

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