高科技廠房設備耗能計算及改善研究

Study of equipment energy consumption calculate and improve in high tech Fab

簡維宏(Wei-Hung Chien)

指導教授 ： 胡石政

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2013年)

摘要

本文主要探討利用Energy Conversion Factors ECF的概念去計算廠務設備的耗電量，藉由提供設備運轉時間條件(Process、Idle、Standby、Stop)的分配及降低資源使用的評估，有關半導體製造設備所產生的能量，將各種不同半導體製造設備的元件消耗量及設備耗能量轉換成等效的年度電能使用率。廠務系統耗電量計算的有效利用和節約，其積極的意義在使用或改善一般用具或工業設備的設計，使其具有最高的能量使用效率，避免能量的無效浪費，而又不致於降低現有的品質，且依照廠務環境基本項目排氣、真空、乾空氣、冷卻水、超純水等等需求一一加以研究，在元件參數差異變化及運算設備運轉差異變化獲得分析結果。在元件與不同設備的基礎上，將通用流率轉換成總年度KW小時(kWh/年)。內容也探討在於半導體廠區內的各項廠務設施的元件設定值比較，所計算出的ECF值基準，作為提供模擬分析運用，可依據需求調節運轉分配的比例計算，找出合適的元件參數設定值，以及各設備的比較，利用模擬數據設定各設備運轉的設定變化，套入既有ECF公式中運算，獲得計算能源消耗值，找出合適的元件參數設定。

關鍵字

消耗能量轉換 ； 全年用電量 ； 降低資源使用

並列摘要

This study aimed to investigate the energy consumption of manufacturing facilities, typically those found in a semiconductor fabrication plant, using the Energy Conversion Factor (EFC) based approach.The EFC approach proposes the opearating schedules of a wide range of semiconductor manufacturing equipment (such as Process, Idle, Standyby and Stop), provides the assessment on the energy throughput and the reduction of resource consumption, and converts various semiconductor manufacturing equipment utility consumption rates into the equivalent annual energy usage. The assessment of energy consumption and conservation on semiconductor facilities can be used as the means to improve the existing tools and the design of equipment in order to assure the optimal energy use and product quality.The variegated operating parameters of various components in the key equipment systems in a semiconductor manufacturing plant, including the exhaust system, vacuum system, compressed dry air system, chilled watr system, water purification system, etc., are also included in the study. The resulting outputs were converted into the unit of kWh/year. Also, the operating setting of various equipment and facilities in a semiconductor manufacturing plant were compared and applied to generate the ECF values, which serves as the baseline for energy conservation simulation. By varying the setting of these operating parameters in the ECF simulation software, the utility usage and optimum operating setting for respective component and system can be generated.

並列關鍵字

Energy Conversion ； Annual energy usage ； Reduction of resources

參考文獻

[12] 曹志明，高科技廠房空調系統節能策略之研究，博士論文，國立臺北科技大學能源與冷凍空調研究所，臺北，2009。

[2] SEAJ，Guidelines for Energy Quantification on Semiconductor Manufacturing Equipment and Utilities，Semiconductor Equipment Ass℃iation of Japan Energy-saving committee，January 1, 2003。

[5] 鄭淙翾，高科技廠房全年能源消耗計算與軟體開發，碩士論文，臺北：國立臺北科技大學能源與冷凍空調工程研究所，2011。

[7] 蔡明衡，以PM5.0粒子驗證不同回風形式之非單一方向流之微粒排除能力，碩士論文，臺北：國立臺北科技大學能源與冷凍空調工程研究所，2011。

[9] P. Naughton. "Measurement of Conservation of Energy by Semiconductor Manufacturing Equipment and setting of targets for improvements,". IEEE International Symposium on Semiconductor Manufacturing, San Jose, CA, 2005,pp. 7-14.