繞捲式真空鍍膜設備的料帶傳輸腔體之數值模擬與幫浦選用

Simulation and Pump Configuration of Transport Chamber in Roll to Roll Coating Equipment

楊儒宜(Ju-Yi Yang)

指導教授 ： 鄭鴻斌

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2010年)

摘要

繞捲式(R2R)真空鍍膜設備為一連續式動態設備，因此分壓腔體內之連續性動態密封技術為其量產之關鍵技術。本研究探討各分壓腔體內之流場與壓力分佈情況，透過模擬以及分析，其結果可供機構設計上之應用，讓腔體之設計與真空幫浦之選用上更具效益。本論文首先計算系統之氣導值反求其抽氣速率再以CFD進行腔體內氣體流場與壓力分佈之模擬分析，並依照所設定之腔體工作壓力搭配幫浦抽氣設備，使其可以利用在此系統上，並使用幫浦抽氣時間計算公式以及VacTran軟體進行幫浦抽氣時間估算。結果顯示所計算之幫浦抽氣速率透過CFD模擬結果可以發現當基板進入腔體中，但基板不捲動時，因基板厚度增加造成腔體之氣體洩漏加劇，抽氣口之氣體速率隨之上升，但除了腔體進口孔隙與抽氣孔有較大流場速度，腔體大部分區域之流場速度皆甚小，但當基板捲動時，基板之厚度越薄，且基板之捲動速度越大，對腔體內部流場造成劇烈的影響；而腔體之幫浦配置分成無油式與油式兩種，分別進行抽氣時間計算，兩者到達工作壓力之時間相差不多，但為避免油氣汙染，建議選擇無油式幫浦配置方式。

關鍵字

繞捲式真空鍍膜設備 ； 計算流體力學 ； VacTran○R

並列摘要

A roll to roll vacuum coating device is a continuous dynamic device, for which the continuous dynamic sealing technology of the individual pressure chamber is a key to mass production. This paper aims to analyze the flow field and pressure distribution within the individual pressure chamber, and apply the simulation and analysis results to structural design of the chamber and selection of vacuum pump. Firstly, conductance of the system was calculated to obtain the pump speed, then CFD was employed to simulate air flow field and pressure distribution within the chamber; next, it was applied to the system in view of the operating pressure of the chamber along with the vacuum pump, while the equation of pump down time and VacTran○R software were used to estimate the pump down time. The calculated pump suction rate and CFD simulation result showed that, with the increasing thickness of substrate, the air leakage of the chamber would be accelerated along with the growing air rate at suction inlet when the static substrate in chamber; however, the flow field velocity for most of chamber regions is relatively small, except for that at the inlet gap and pump suction port. But thinner substrate and higer substrate scrolling speed maked the flow field in the chamer severe change, when the substrate rolling. The pump dispose for the chamber has two types, namely, oil-less and oil types, both of which reach the operating pressure almost at the same time. It is suggested that oil-less pump is selected to prevent oil pollution.

並列關鍵字

Roll to Roll Coating Equipment ； CFD ； VacTran○R

參考文獻

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