有機/無機複合薄膜對阻氣性質之研究

Moisture Barrier Properties of Organic/Inorganic Mltilayer Coatings on Plastic Substrate

張雅郡(Ya-Jiun Chang)

指導教授 ： 張淑美

國立臺北科技大學/工程學院/有機高分子研究所/碩士(2007年)

摘要

軟性顯示器因具有輕、薄、攜帶方便、可捲繞等優越的特性，因此將成為新世代顯示器的發展趨勢。然而目前仍有許多關鍵性材料與製程條件限制亟待克服與突破，其中又以軟性塑膠基板本身對氧氣與水氣的阻隔效果將影響該顯示產品的使用壽命，進而直接影響整個軟性顯示器的未來發展趨勢。針對此問題，眾多學者製備各類阻障層(有機膜及無機膜)以隔絕水氣滲透。雖然無機膜之阻氣性較有機膜佳，但是無機膜在一定厚度時，其內應力之增加將造成膜材之微破裂，導致阻氣性不再隨厚度增加而提高。有鑑於此，本研究以多層之有機及無機薄膜交錯疊合的方式，進而達到降低內應力及提高厚度之雙重目的，使其透濕率更為降低。無機層的部分是採用真空蒸鍍法，將銀鍍著於基材上，再以電漿氧化可得AgOx膜於基材表面，而有機層的部分則是以紫外光硬化樹脂製備。藉由改變電漿處理功率、處理時間等參數，探討製程參數對阻氣膜透濕率及透光性的影響。

關鍵字

塑膠基板 ； 紫外光硬化樹脂 ； 金屬氧化物 ； 阻氣膜

並列摘要

Recently, flat panel displays using plastic substrates have been the focus of attention due to the advantages of being thin, lightweight, robust, and flexible. Plastic substrates must be equipped with many to them applicable to the fabrication of display, such as thermal resistance, transparency, permeation of O2 and H2O, resistance against chemicals and solvents. However, the high permeation of water vapors and oxygen through plastic substrates is an important problem in the flexible flat panel display applications. To solve this problem, multilayer organic/inorganic thin films on polyethylene terephthalate (PET) substrates were investigated. The multilayer organic/inorganic thin films consisted of alternate layers of silver thin films and composite polymer films. Silver films were deposited by thermal evaporation and further oxidized with plasma. Composite polymer films consisted of UV curable resin with or without filler. The effects of process parameters such as RF power, time of treatment and thickness of films on water vapor transmission performance were investigated.

並列關鍵字

plastic substrate ； UV curable resin ； metal oxide ； gas barrier film

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