量測非均向薄膜之偏極轉換偏極態與光學常數

Determination of optical constants of an anisotropic thin film by measuring the polarization states associated with polarization conversion reflection

劉致煒(Chih-Wei Liu)

指導教授 ： 任貽均

國立臺北科技大學/機電學院/光電工程系所/碩士(2007年)

摘要

本篇論文提供一個針對非均向光學薄膜的量測方法。稜鏡藕合與入射面夾沉積面90度可增強偏極轉換的反射率。藉由旋轉析光片的方式，量測偏極轉換的反射偏極態。利用偏極態對光學常數的靈敏度，優化薄膜的光學常數。實驗上，以當氟化鎂作蒸鍍材料，將基板傾斜沉積。量測單層柱狀薄膜的厚度、柱狀結構傾斜角、三主軸折射率。並且討論入射光極化態的誤差，反應在光學常數的影響。

關鍵字

光學薄膜 ； 光學特性 ； 光學常數

並列摘要

In this work, the polarization state of reflected light from anisotropic thin film is studied and measured when polarization conversion reflection becomes obvious. It is found that the polarization state measurement is a sensitive method to detect the optical constants of an anisotropic thin film.
In experiment, the Magnesium fluoride film is prepared in a thermal coater. The optical constants include thickness, the columnar angle and three principle refractive indices can be measured by polarizer-sample-analyzer system. The sensitivities and errors of the measurement are discussed and optical constants can be detected precisely.

並列關鍵字

Optical thin film ； Optical characteristic ； Optical constants

參考文獻

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