添加硼元素和氮氣對鋯銅鋁鎳金屬玻璃薄膜機械性質之影響

本研究第一階段藉由直流磁控濺鍍系統濺鍍系統，並利用單一Zr-Cu-Al-Ni合金靶和硼靶，並改變不同硼含量以製備含硼的Zr-Cu-Al-Ni金屬玻璃薄膜(Thin film metallic glasses, TFMGs)。其第二階段藉由通入氮氣於含硼的Zr-Cu-Al-Ni金屬玻璃薄膜(Thin film metallic glasses composites, TFMGCs)。由第一階段實驗結果發現，添加特定硼元素含量之後，TFMG薄膜仍為非晶結構，且能有效降低表面粗糙度，薄膜硬度也從5.0 GPa 提升至8.8 GPa，附著性品質和韌性也有不錯的性能。第二階段實驗結果發現，在6.4 at.% 的硼和32.6 at.%的氮加入，薄膜硬度達到最高值16.2 GPa，其附著性和韌性皆有提升。綜合以上結論，添加硼元素和氮氣能有效的提升Zr-Cu-Al-Ni金屬玻璃薄膜的機械性質。

關鍵字

ZrCuAlNi ；複合金屬玻璃薄膜(TFMGCs) ；附著性質；硼；氮； ZrN

並列摘要

The metallic glass thin films have attracted considerable scientific and commercial attention due to their unique characteristics, such as high elastic energy, high hardness, good wear and corrosion resistance. In this work, nitrogen contained and B doped Zr-Cu-Al-Ni thin film metallic glass composites (TFMGCs) were grown by magnetron co-sputtering process. Boron element was doped to evaluate its influence on the microstructure and mechanical properties of nitrogen contained TFMGCs. It was concluded that the surface roughness, microstructure, glass-forming ability and mechanical behaviors of TFMGCs were strongly influenced by the nitrogen and boron doping. The ZrN nanocrystallites were embedded in the amorphous matrix. The hardness, H/E ratio, and indentation toughness increased with increasing boron concentration. Excellent adhesion quality was also confirmed for all coatings. The Zr-based thin film metallic glass composite containing 6.4 B-32.6 N (in at.%) with optima hardness, 16.2 GPa, adequate indentation toughness and excellent adhesion quality was achieved in this work.

並列關鍵字

Zr-based thin film metallic glass composite ； Adhesion ； Boron ； Nitrogen ； ZrN

參考文獻

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國際替代計量

添加硼元素和氮氣對鋯銅鋁鎳金屬玻璃薄膜機械性質之影響

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