- 學位論文
超深冷處理對披覆DLC NAK80模具鋼特性之影響
Effect of Cryogenic Treatment on NAK80 Steel Deposited DLC Film
摘要
本研究利用已披覆類鑽碳(Diamond-like carbon, DLC)膜之NAK80模具鋼，進一步進行超深冷處理(cryogenic treatment)，探討經超深冷處理後對DLC之微結構、硬度、耐磨耗及附著性之影響。製備後的薄膜試片分別作以下的分析：以輝光放電分析儀(GDS)、掃描式電子顯微鏡(SEM)、能量散射光譜儀(EDS)，以及拉曼光譜儀分析薄膜結構、厚度與成份；以洛氏硬度試驗機的C scale與刮痕試驗機分析薄膜的附著性；以磨耗試驗機分析薄膜的耐磨耗特性及摩擦係數；以奈米壓痕試驗分析薄膜硬度及楊氏係數；並藉由水接觸角分析薄膜之親、疏水性；最後耐腐蝕試驗分析薄膜抗腐蝕性特性。 由研究結果得知，經超深冷處理後NAK80模具鋼基材，促使析出碳化物的數量增加，晶粒組織明顯變小。經超深冷處理後，鍍層之附著性、磨耗壽命、摩擦係數、硬度、水接觸角，以及耐腐蝕性皆獲得明顯改善，並透過拉曼光譜分析發現，經超深冷處理後類鑽碳膜之拉曼強度比(ID/IG)較未超深冷處理小，其sp3鍵結含量的比例增加也會使得類鑽碳薄膜硬度提升。
並列摘要
In this study, Fabrication of hydrogenated diamond-like carbon (DLC) films by having been finished the cathode arc plasma deposition (CAPD) on the surface of NAK80. Cryogenic process was further used for treating the fabrication of these specimens. This study was investigated the change of microstructure, hardness, wear resistance and adherence after being cryogenic treated. These specimens were analyzed by following methods: the film structure thickness and composition of the films were measured and analyzed by using glow discharge optical emission spectrometer(GDS), scanning electron microscope (SEM), energy dispersive spectrometer(EDS) and the raman spectrometer. The adhesion properties of the films were analyzed by using Rockwell C scale hardness tester and scratch tester. The wear resistance and the coefficient of friction of the films were analyzed by using wear-test machine. The hardness and Young’s modulus of the films were analyzed by using nano-indenter tester. The corrosion resistance of the films were analyzed with corrosive tester, and the hydrophilic properties of the films were analyzed by using water contact angle tester. According to the experimental results, the cryogenic treatment affects the amount and microstructure of carbide. Under the same cryogenic treatment condition, significant improve of adhesion, wear resistance, coefficient of friction, hardness, hydrophilic, corrosion resistance. And the raman spectrometer analysis show that the raman intensity ratio (ID/IG) of films decreased. The effect of cryogenic treatment has promoted the sp3 bonding, correlate well with the film hardness.