以CAPD法於NAK80模具鋼表面沉積DLC膜之特性研究

The characteristics of DLC film deposited on NAK80 mold steel using CAPD method

林俊銘(Chun-Ming Lin)

指導教授 ： 韓麗龍

國立臺北科技大學/機電學院/製造科技研究所/碩士(2009年)

https://doi.org/10.6841/NTUT.2009.00378

摘要

NAK80為常應用在塑膠模具鋼鏡面加工的材料，本研究是以陰極電弧電漿蒸鍍法 (cathode arc plasma deposition, CAPD)，對NAK80模具鋼施以類鑽碳(Diamond-like carbon, DLC)膜的表面處理。DLC膜製程分為三種不同的參數，以控制H2、C2H2、與Si的流量。製備後的試片分別以拉曼光譜儀、掃描式電子顯微鏡(SEM)與輝光放電分析儀(GDOS) 觀察薄膜結構、膜厚、及成份。進一步以原子力顯微鏡(AFM)、奈米壓痕試驗、磨耗試驗、附著性試驗及水接觸角試驗分別來觀測薄膜表面形貌、表面粗糙度、硬度、楊氏係數、耐磨耗性、摩擦係數、附著性與親水性。
實驗得知，經由陰極電弧電漿蒸鍍法在NAK80表面鍍上DLC膜後，各DLC 膜試片磨耗率隨著薄膜硬度、楊氏係數增加而增加。拉曼強度比(ID/IG)愈大，亦即石墨化程度愈高，sp2 的量就愈多，雖然硬度稍低，但石墨具有潤滑的作用，而增加耐磨耗性。並且在滲入Si含量後，附著性也提升，而在鍍層表面的接觸角越大，越容易脫模，不易發生黏附摩擦，可確保成品尺寸精度、延長模具壽命。

關鍵字

陰極電弧電漿蒸鍍法 ； 拉曼強度比 ； 類鑽碳膜 ； NAK80模具鋼

並列摘要

NAK80 is a commonly used material for the mirror surface of plastic molds. In this study, cathode arc plasma deposition (CAPD) is used to form diamond-like carbon (DLC) film on the surface of NAK80. Three different parameters were controlled in this process, including the flow rates of H2, C2H2, and Si. The film structure, thickness, and composition were measured and analyzed by using Raman spectrometer, scanning electron microscope (SEM) and Glow Discharge Optical Emission Spectroscopy (GDOS). The film surface morphology, surface roughness, hardness, Young’s modulus, wear resistance, friction coefficient, adherence and hydrophile were tested with atomic force microscope (AFM), nano-indenter, wear-test machine, adhesion test, and water angle test.
Results show that the wear rate of the DLC film coating increased with the film hardness and Young’s modules. The larger the Raman intensity ratio (ID/IG), the more the degree of graphite and the amount of sp2 was. CAPD process improved the wear resistance due to the lubrication of graphite. After Si is doped, the film coating’s adherence enhanced. When the water angle of the mold was larger, it tended to come off the coating; i.e., adherence and wear did not take place. Thus, this coating can ensure the precision of final products and lengthen the use of plastic molds. D3 test film was found to be the most effective.

並列關鍵字

Cathode Arc Plasma Deposition (CAPD) ； Raman intensity rate ； Diamond-like Carbon (DLC) film ； NAK80

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