- 學位論文
NAK80模具鋼表面沉積TiCN陶瓷硬質薄膜之研究
A Study of TiCN Film Deposited on NAK80 Mold Steel
摘要
本研究採用陰極電弧沉積法改變C2H2的流量(A製程56 sccm, B製程28 sccm, C製程14 sccm)對NAK80模具鋼表面沉積TiCN薄膜，以改善材料表面的機械性質，並對其特性做研究。以三種不同製程參數得試片分別作以下的分析：(1)以輝光放電分析儀(GDS)、掃描式電子顯微鏡(SEM)及能量散射光譜儀(EDS)分析薄膜厚度及成分；(2)以XRD分析薄膜結構；(3)以奈米壓痕試驗來分析薄膜硬度及楊氏係數；(4)利用洛氏硬度試驗機的C scale分析薄膜的附著性；(5)以磨耗試驗機分析薄膜的耐磨耗特性及摩擦係數；(6)以水接觸角試驗來分析薄膜之親、疏水性；(7)以及藉由耐腐蝕試驗來分析薄膜抗腐蝕特性。 實驗結果顯示，TiCN薄膜結構特徵峰為(111), (200), (222)，以(111)方向為擇優取向；鍍層薄膜之厚度分別為3.98、4.08及4.21 μm。NAK80基材之硬度值為HV 387與摩擦係數值為0.79；而A、B及C三種薄膜之硬度值分別為HV 3082、HV 2703及HV 2314，其摩擦係數值為0.21、0.34及0.41。在附著性部分，經壓痕測試得知三種薄膜分別具有HF3、HF3及HF2的等級。而耐磨耗性為A＞B＞C＞NAK80，其中以A薄膜之磨耗率最小擁有最高的耐磨耗性，其值為1.06×10-6 mm3/N-m。綜合以上的分析，得知NAK80模具鋼經CAE之表面鍍膜處理後，可以明顯的提高硬度值，有效的降低摩擦係數並改善表面耐磨耗性。 由水接觸角試驗分析得知，三種薄膜的水接觸角分別為102.3°、80.1°及69.2°，其中以A薄膜試片的水接觸角為最大，具有較好的脫模性。最後，藉由鍍層耐腐蝕試驗可以得知，B薄膜有較高的腐蝕電位，其值為-262.81 mV，具有較佳之耐腐蝕性。
並列摘要
This study applies Cathodic Arc Evaporation (CAE) process to form TiCN film on the surface of NAK80 and to improve the mechanical properties of surface. We change three differentProcess parameters(C2H2；A=56 sccm, B=28 sccm, C=14 sccm) These specimens were analyzed by following methods: (1)thickness, and composition of films were measured and analyzed by using Glow Discharge Optical Emission Spectroscopy (GDOES), Scanning Electron Microscope (SEM), and Energy Dispersive Spectrometer (EDS); (2)the film’s structure analyzed using X-ray diffraction (XRD);(3)the hardness and Young’s modulus analyzed using Nano-indentation test; (4) the adhesion properties were analyzed by using Rockwell C scale hardness tester; (5) the wear resistance and coefficient of friction analyzed using wear-test machine; (6)hydrophilic properties were analyzed by using water contact angle tester; and(7)corrosion resistance of filmanalyzed with corrosive tester. Results show the main characteristic peak and the diffraction angle (2θ) of TiCN film are (111), (200), and (222). The thicknesses of the three samples are 3.98, 4.08, and 4.21 μm, respectively.The hardness and friction coefficient of the NAK80 substrate is HV 387 and 0.79. However, the three films are HV 3082, HV 2703, and HV 2314, and the coefficients of friction are 0.21, 0.34, and 0.41, respectively. Rockwell indentation test, the quality adhesion of the three films are HF3、HF3 and HF2, respectively. The wear resistance analysis showsA＞B＞C＞NAK80, and a minimum wear rate of A is 1.06×10-6 mm3/N-m.Through the above analytic results, using CAE process deposited TiCN film on the surface of NAK80 can enhance the coefficientof friction, and the surface wear resistance. By using water contact angle test analysis, the water contact angles of the three samples, A, B, and C, are 102.3°, 80.1°, and 69.2°. It indicates A has a maximum water contact angle and a better draft performance.Finally, the corrosive test shows B has a highest Corrosion potential, -262.81 mV, which means B has a better corrosiveresistance among the three deposited films.