- 學位論文
NAK80模具鋼表面沉積TiN, CrN及TiN/TiAlN薄膜之研究
A Study of TiN, CrN, TiN/TiAlN Film Deposited on NAK80 Mold Steel
摘要
NAK80為常應用在塑膠模具鋼鏡面加工的材料，在本研究中，採用陰極電弧沈積法(Cathodic Arc Evaporation, CAE)對NAK80模具鋼表面披覆TiN、CrN及TiN/TiAlN三種不同製程的薄膜。製備後的薄膜試片分別作以下的分析：(1)以X-射線繞射(XRD)分析薄膜結構；(2)以輝光放電分析儀(GDS)、掃描式電子顯微鏡(SEM)及能量散射光譜儀(EDS)分析薄膜厚度及成份；(3)以原子力顯微鏡(AFM)分析薄膜表面形貌及表面粗糙度；(4)以奈米壓痕試驗來分析薄膜硬度及楊氏係數；(5)以磨耗試驗機分析薄膜的耐磨耗特性及摩擦係數；(6)利用洛氏硬度試驗機的C scale分析薄膜的附著性；(7)以水接觸角試驗來分析薄膜之親、疏水性；(8)以及藉由耐腐蝕試驗來分析薄膜抗腐蝕特性。
實驗結果顯示，在NAK80表面鍍層薄膜結構中，TiN、CrN、TiN/TiAlN薄膜結構主特徵峰及繞射角(2θ)分別為(111)與36.37°、(200)與43.44°、以及(111)與37.01°，鍍層薄膜之厚度分別為0.88、2.36及2.86 μm。NAK80基材之硬度值為Hv 387與摩擦係數值為1.035；而TiN、CrN及TiN/TiAlN三種薄膜之硬度值分別為Hv 2583、Hv 1923及Hv 3125，其摩擦係數值為0.43、0.32及0.45。在附著性方面，經壓痕測試得知三種薄膜分別具有HF2、HF3及HF1的等級。而磨耗率為CrN
並列摘要
NAK80 is a commonly used material for the mirror surface of plastic molds. In this study, three different types of films, TiN, CrN films and TiN/TiAlN, were deposited on the NAK80 by using Cathodic Arc Evaporation (CAE) process. These specimens were analyzed by following methods: (1) the film’s structure analyzed using X-ray diffraction (XRD); (2) thickness, and composition of films were measured and analyzed by using Glow Discharge Optical Emission Spectroscopy (GDOES), Scanning Electron Microscope (SEM), and Energy Dispersive Spectrometer (EDS); (3) film’s surface morphology and roughness were tested with Atomic Force Microscope (AFM); (4) the hardness and Young’s modulus analyzed using Nano-indenter; (5) the wear resistance and coefficient of friction analyzed using wear-test machine; (6) the adhesion properties were analyzed by using Rockwell C scale hardness tester; (7) hydrophilic properties were analyzed by using water contact angle tester; and (8) corrosion resistance of film
analyzed with corrosive tester.
Results show the main characteristic peak and the diffraction angle (2θ) of TiN, CrN and TiN/TiAlN films are (111) and 36.37°, (200) and 43.44°, and (111) and 37.01°, respectively. The thicknesses of the three films are 0.88, 2.36, and 2.86 μm, respectively. The hardness and friction coefficient of the NAK80 substrate is Hv 387 and 1.035. However, the three films are Hv 25835, Hv 1923, and Hv 3125, and the coefficients of friction are 0.43, 0.32, and 0.45, respectively. Rockwell indentation test, the quality adhesion of the three films are HF2、HF4 and HF1, respectively. The wear rate analysis shows the film of CrN