潔淨室外氣空調箱空氣水洗機去除無機酸鹼氣體污染物

Removal of Inorganic Gas Contaminant by Air-Washer in Make-up Air Units in Cleanrooms

趙世閔(Sei-Ming Chao)

指導教授 ： 施陽正 ； 胡石政

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2008年)

https://doi.org/10.6841/NTUT.2008.00611

摘要

近年來由於半導體工業製程的進步與線徑的微小化，對於製程環境污染的關切已由原有的粒狀固體污染物變為氣態分子污染物(AMC, Airborne Molecular Contaminant)，潔淨室本身產生的AMC可由風機過濾器(FFUs, Fan Filter Units)上的化學過濾器去除，但外氣部份則必需靠外氣空調箱(MAUs, Make-up Air Units)內裝的化學過濾器或空氣水洗機加以清除。由於化學過濾器價格昂貴，作為良好氣體吸收液且廉價的水便成為去除AMC之最佳方式。但目前空氣水洗機對於空氣中AMC去除之能力則有待提升。
在本研究中，我們在空氣水洗機後端加裝親水性離水板來增加氣-液接觸面積，搭配噴灑小粒徑的噴嘴來提升去除效率本實驗污染物來源為鋼瓶釋放，搭配業界常用尺寸之外氣空調箱，並利用經驗公式與實驗數值進行分析比對。實驗結果發現在液-氣比為0.12時，對於二氧化硫的去除效率為73.91 ± 2.66%，而對氨氣的去除效率為82.23 ± 4.91%。在此結果中，我們可以發現空氣水洗機使用微小粒徑噴頭搭配濕模板可以增加氣液接觸面積。因此空氣水洗機在較小液氣比下，將可有效去除無機酸鹼氣態污染物，而避免耗費多餘的水量與設置成本。若能減少外氣端無機污染物的濃度，將可延長後端化學濾網的壽命，減少汰換頻率。

關鍵字

空氣水洗機 ； 氣態分子污染物 ； 外氣空調箱

並列摘要

The micro-contamination has been shifted to Airborne Molecular Contaminants (AMCs) caused by smaller pitch of wafer manufacturing process requested by semi-conductor industries. The AMCs generated in the cleanroom can be removed by chemical filter installed on FFUs. For outdoor make-up air, the AMCs can be removed by air washers and chemical filters installed on make-up air units (MAUs). However, chemical filters cause high capital and operation cost. An-easy-to-get, cheap and effective water applied on air washer will become a good gas-absorb working fluid. Making the air-washer as a humidifier with scrubber-like performance is the most urgent work for AMCs abatement.
In this research, we developed a new type of air washer whose removal efficiency was raised by the hydrophilic eliminator which has high gaseous absorption capability and the high efficiency spray nozzles which spray smaller droplets. The sources of chemical contaminants such as ammonia(NH3), sulfur dioxide(SO2) was discharged from the stainless steel cylinders ,and the dimensions of make-up air unit are conventional in Industries.We In addition, we use the empirical formula to analyse and inspect the experimental data.Experimental results cleared that removal efficiency was 73.91 ± 2.66% in case of SO2 and 82.23 ± 4.91% in case of NH3 when the liquid/gas volume ratio is 0.12. These results suggest that the air washer with the fine water spray and hydrophilic eliminator can increase the gas-liquid contact area. Thus, the air washer with fine water spray and hydrophilic eliminator can use less liquid/gas volume ratio to remove the inorganic gas contamination effectively. We can avoid wasting the water volume and reduce the cost from the appliances. If we can reduce the concentration of the contaminant from the intake air , the load of a expensive chemical filter can decrease and give a long life to it.

並列關鍵字

Air Washer ； AMC (Airborne Molecular Contaminant) ； MAU (Make-Up Air Unit)

參考文獻

[3]SEMI F21-1102, “Classification of Airborne Molecular Contaminant Levels in Clean Environments.”, Semiconductor Equipment and Materials International, Mountanin View, CA, 2002.

[4]SIA ,International Technology Roadmap for Semiconductor (ITRS),“Yield Enhancemens”, International Sematech, Austin,TX , 2006 edition.

[8]H. Wakamatsu, et al., "High Efficiency Airborne Molecular Contaminants Removal Technology by A New Cooled-Type 2-Stage High-Speed Air Washer Method," The Ninth International Symposium on Semiconductor Manufacturing, pp 289-292, 2000.

[9]H. Wakamatsu, et al., ”New Chemical Removing and Air Cooling Technology for Clean Room Recirculation Air using Chilled Pure Water Showering Method”, Semiconductor Manufacturing Symposium,IEEE International ,pp.485-488, 2001.

[12]S.J. Lue, C. Huang, “Application of Ion Chromatography to the Semiconductor Industry II – Determination of basic Airborne Contaminants in Cleanrooms”, Journal of Chromatography A, Vol.850, pp.283-287, 1999.