系統工程於半導體製程問題之改善與應用

The application of system engineering to process improvement in the semiconductor

鄭維揚(Wei-yang Cheng)

指導教授 ： 李穎

元智大學/工程學院/電機工程學系/碩士(2001年)

摘要

系統工程目的在整合系統中的不同單位和個人，以達成系統的共同目標。系統工程可應用在各種領域，其專業和知識技術固然重要，但觀念才是系統工程成功的基礎。就目前的各大企業來說，對於解決問題仍多注重在「技術手法」上，而系統工程中的要素，也是解決問題的關鍵－「介面溝通」，則往往是各企業內部發展的一個重大的阻礙。本論文就「介面溝通」的重要，對傳統「完全責任劃分法」所引發的部門與部門間之問題，以結合簡單的網路架構與K.T.分析法，提出新的介面溝通模式，打開部門間的隔閡，得到各種解決問題的資源，並就實際上得到的成果加以探討。

關鍵字

系統工程 ； 半導體 ； 網路管理 ； 系統倫理

並列摘要

The goal of systems engineering is to integrate the different individuals and departments in a system so that the system''s mission can be successfully accomplished. Systems engineering can be applied to systems in many areas, it has five basic procedures : ?feasibility study, standard, interface, design, evaluation, action?. Although the theory and techniques are very important, ?concept? is the key to the success of systems engineering. However, concept can only be built with sufficient communications and mutual respect between all members of the system. Most companies today focus on specialized step-by-step techniques in problem solving. The important task of establishing a good ?interface?, which allow the system?s members to communicate effectively, is often neglected. This leads to obstacles especially for growing companies. Understanding the importance of ?interface?, this thesis proposes to modify the daily K. T. Analysis charts for solving light resist thickness problem in TSMC, Tainan to invite comments and suggestions, and put the charts on the company?s computer networks to allow for open discussions. This flexible interface allows company members to access information any time, anywhere, and has proved to be very effective in speeding up the problem solving process.

並列關鍵字

System Engineering ； Semiconductor ； K.T. analysis ； S.P.C

參考文獻

[1] Charles H. Kepner，Benjamin B. Tregoe， THE NEW RATIONAL MANAGER，Princeton Research，1981

[4] J.C. Doyle， Analysis of Feedback System With Structured Uncertainties，IEE，129（6）：242-250，1982

[9] Frosch， A New Look at System Engineering，IEEE Spectrum，PP 24-28，1966

參考文獻

[2] Honeywell Plaza，Minneapolis，Minnestota， System Engineering Guidelines，SE Guidelines，1983