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  • 學位論文

應用先進規劃排程模擬模式於晶圓廠生產系統之改善

Using APS Simulation Model to Improve the Wafer Fabrication Production System

指導教授 : 丁慶榮
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摘要


在晶圓的製造過程中,耗時最多的是等候時間,若晶圓廠無法掌握生產製造現場實際產能狀況及生產排程狀況,對於企業的供應鏈將造成嚴重傷害。而應用先進規劃排程模擬模式結合派工系統,提供What-If的分析,協助晶圓廠生產排程,降低生產週期時間,提高訂單的達交率。 本研究中使用AutoSched APTM為模擬軟體,產生考慮晶圓需求日與晶圓預測產出日的新生產等級,將新產生的生產等級導入實際派工系統中,達成生產控制提高顧客訂單的達交率的目的。 本研究主要分為兩部分,第一部份是建立晶圓廠生產系統的模擬模型,並以實際資料驗證;第二部分則是提出新的生產等級修正模型,配合先進規劃排程模擬模型降低訂單的生產週期時間,並提高訂單達交率。 經由實際資料驗證的效益分析比較,發現使用生產等級修正模型對晶圓生產週期時間,確實能夠有效的縮短生產週期時間達0.84天,並將客戶達交率由原來的93.7%提高到97.6%。 本論文針對晶圓廠運用先進規劃排程的模擬模式,完成生產系統的自動化,提供生產管理系統一個有效的改善方法。

並列摘要


In wafer fabrication, the queue time consumed most of the cycle time. The APS simulation model was developed to support the wafer fabrication automation production system as an efficiency solution. In this study, the AutoSched APTM was used as simulation tool. In this new production priority modify model, consider the customer’s require due-date and the forecast wafer out date by simulation model. This model will apply the new setting priority into dispatching system to access the objective of production control. There are two phases in this study. In phase one, the simulation model was built and validated by real data. In phase two, the new priority setting model was linked with dispatching system as an APS to achieve the high on time delivery rate. After real data application, this new production priority modify model was proved can reduce the production cycle time by 0.84 day and enhance on time delivery from 93.7% to 97.6%. This study had successful in whole wafer fabrication production control by APS Simulation Model. It really find out the simply method to direct control the production and on time delivery.

參考文獻


21.Kim, Y. D., J. U. Kim, S. K. Lim, and H. B. Jun, 1998,“Due-Date Based Scheduling and Control Policies in a Multiproduct Semiconductor Wafer Fabrication Facility”, IEEE Transactoins on Semiconductor Manufacturing, Vol.11, pp.155-164.
23.Law, A. M. and M. C. McComas, 2002, “Simulation-Based Optimization”, In Proceedings of the 2002 Winter Simulation Conference, pp.41-44.
26.Liu, C., S. Thongmee, and P. Hepburn, 1995,”A Methodology for Improving On-Time Delivery and Load Leveling Starts”, IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp.95-100.
27.Lou, S., and P. W. Kager, 1989, “A Robust Production Control Policy for VLSI Wafer Fabrication”, IEEE Transactions on Semiconductor Manufacturing, Vol.2, pp.159-164.
28.Lu, S. C. H., and P. R. Kumar, 1991, “Distributed Scheduling Based Due Dates and Buffer Priorities”, IEEE Transactions on Semiconductor Manufacturing, Vol.36, pp.1406-1416.

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