本論文成功利用溶凝膠法與低溫製程製作出具有高效能的TiO2光觸媒薄膜。將所合成的溶凝膠溶液塗佈於玻璃基板上,再利用熱水浴法與低溫燒結法製作此薄膜。於製程中探討熱處理時間、溫度、及氣氛對光觸媒薄膜效應的影響。使用各種分析儀器觀察不同低溫製程膜的材料性質以及光觸媒能力。結果顯示,濕空氣燒結下的光觸媒能力優於乾空氣,發現是因為在不同氣氛下燒結,組成中PEG的存在會影響其光觸媒的效應。熱水浴法製作的TiO2薄膜由於附著性不佳,使得光觸媒表現較差;低溫燒結法製作的TiO2薄膜其光觸媒能力的主要影響變因是燒結氣氛及燒結溫度。燒結溫度提高時,其光觸媒效應不佳,這是因為燒結溫度提高時造成PEG黏著劑的熱解,同時造成TiO2薄膜附著性的降低而使得光觸媒效應降低。所以PEG的存在與否是影響TiO2薄膜光觸媒能力優劣的原因。
High efficient TiO2 photocatalyst thin films were fabricated in this study using sol-gel method and low temperature treatments. The films were prepared by the sol-gel solution coated on glass using hot water bath, wet-air, and dry-air thermal treatment. The photocatalytic effects of operating variables, such as the temperature, time, and atmosphere of thermal treatments on the films were discussed. The material properties affecting on the photocatalytic ability of the films were measured by different analytical instruments. Results show that thermal processing methods can greatly affect the photocatalytic ability of the TiO2 films. The best quality of photocatalytic films were fabricated by wet air at 100oC. In addition, the quality of the films can not be improved using higher temperature and longer time in thermal process. The presence of PEG added in the sol-gel process was found the important factor to affect the photocatalytic effect of the films. The effects of the thermal treatments on the photocatalytic influences were discussed.