Preparation of Titanium Oxide Coatings Synthesized by Cathodic Arc Deposition

以陰極電弧電漿沉積技術製備二氧化鈦薄膜材料

何偉友(Wei-Yu Ho) ； 詹慕萱(Mu-Hsuan Chan) ； 姚國山(Kao-Shan Yao) ； 張奇龍(Chi-Lung Chang)

《明道學術論壇》 4卷1期 (2008/06) Pp. 1-12

https://doi.org/10.6953/MJ.200806.0001

摘要

藉由改變腔體內氧氣壓力為0.13至1.95 Pa，本研究以陰極電弧電漿沉積技術沉積二氧化鈦薄膜，由結果顯示，在氧氣壓力為0.65至1.30 Pa之範圍內所沉積之二氧化鈦薄膜，以X光繞射分析發現組織為銳鈦礦結構，至於其他條件所沉積之二氧化鈦薄膜為非晶質結構。以紫外線照射之水接觸角和亞甲基藍溶液分解之試驗，發現在氧氣壓力1.30 Pa之條件下所沉積之二氧化鈦薄膜具有光觸媒的效應。藉由紫外線照射之水滴，經過25分鐘之照射後，二氧化鈦薄膜可以將水滴角度由42度降為零度，顯示親水的效果。藉由紫外線照射之亞甲基藍溶液，經過8小時之照射後，二氧化鈦薄膜可以分解此溶液接近透明程度。

關鍵字

二氧化鈦薄膜 ； 陰極電弧電漿沉積 ； 光觸媒

並列摘要

Pure titanium dioxide (TiO2) films were synthesized by cathodic arc deposition technology with the variation of oxygen gas pressures from 0.13 to 1.95 Pa. The result turned out that TiO2 films, deposited at O2 pressure of 0.65~1.3Pa, showed a structure with anatase type phase as observed by X-ray diffraction spectrometer, while the other films exhibit an amorphous structure. The coatings deposited at the 1.3 Pa exhibits photo-catalystic activity in the fields of reducing water contact angle and bleaching of methylene blue (MB) under the irradiation of UV light. In this study, the best result of hydrophilic property is that TiO2 film irradiated by UV light does activate the decreasing of the water contact angle from 42° to zero after 30 minutes. After 8 hours irradiation, the bleaching of MB color after UV irradiation was occurred with immersion of the TiO2-coated samples which deposited at oxygen pressure of 1.3Pa. The final solution of MB was clear and more colorless than that tested by the other coatings.

並列關鍵字

Titanium Oxide Thin Films ； Cathodic Arc Plasma Deposition ； Photo-catalyst