晶圓製造廠以關鍵機台為管制要素之生產監控系統架構

Production Monitoring and Control System by Managing the Key Machines in a Wafer Fabrication Factory

蕭進國(Jin-Kuo Hsiao)

指導教授 ： 張百棧博士

元智大學/工程學院/工業工程與管理學系/碩士(2001年)

摘要

半導體的製程複雜，又具有再回流（Re-entrant）與重加工的特性，產品需回流到部份同類型之機台數十次之多，且多達四百至六百道的步驟，因此造成生產管理上更加其困難。如何以較簡化的方式，從數百個步驟的製程中，藉由監控系統的應用，清楚明白的顯示目標與實際生產狀況，並即時進行管制與監控，以利達成產出目標，是當前晶圓代工業非常重要的生產管理課題。
本研究基於半導體製程高複雜性與客戶導向的生產型態，發展一目標導向與以關鍵機台為管制要素之生產監控系統。此監控系統採區段管理之方式，設置適當的管制點，可以完全掌握製程前、中、後段，甚至是關鍵機台的生產狀況；另外，經由目標達成的資訊，建構管制點派工法則以使目標得以達成。經由本研究的監控系統架構，可以提供管理者簡化且有效的生產目標與進度的資訊；於生產目標方面，可提升交期達成率與減少生產週期時間與變異，並避免月底症候群發生。

關鍵字

再回流 ； 重加工 ； 區段管理 ； 管制點派工法則 ； 月底症候群

並列摘要

The processes of wafer fabrication are complicated and have characters of re-entrant and rework. The lots will entry the same machine groups around 10 ~ 30 times and contains 400 ~ 600 steps. It’s process characters cause difficulties in production management. Hence, how to use a monitoring and control system to simplify controlling production progress are the key improvement concerns for major production management.
In this research, a Production Monitoring and Control System by Managing the Key Machines was proposed to improve the above production problem. This system is based on section management and sectors setting up. By these sectors definitions, supervisors could catch all information of production progress instantaneously. By the messages of target achieving sector dispatching rule is developed to enhance target acievement. The results showed that this Production Monitoring and Control System could clearly provide the information of production and improve due-date fulfillment. It also improved line balance and avoided The End-of the Month Syndrome.

並列關鍵字

Re-Entrant ； Rework ； Section Managemen ； Sector Dispatching Rule ； The End-of the Month Syndrome

參考文獻

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