磁浮平臺垂直定位系統之研究

The Vertical Position Control System of Magnetic Levitation Table

汪天筠(Tien-Yun Wang)

指導教授 ： 吳昌暉

元智大學/工程學院/機械工程學系/碩士(1995年)

摘要

本論文係自行研製一套「磁浮平台垂直定位系統」，按系統工程之研究
模式，由訂定系統規格、設計、分析、製作、組裝、實驗等完整程序對系
統各部分進行理論與硬体實現之研究，系統包含永久磁鐵、電磁鐵、電流
放大器、渦電流位移感測器、平臺機械架構及數位控制器等六大主要元件
，用永久磁鐵負責平台重力，運用電磁鐵磁通量變化進行平台垂直三自由
度(垂直升降.俯仰.滾轉)之控制，使重量大於6公斤之平台能達到系統需
求之姿態變化、定位精度及抗干擾性。 採用線性方法及解耦(Decouple)
方式設計一階Lead數位控制器，操作時則採六自由度控制器同時運作，實
驗顯示平台穩定浮起、各迴路同時達到穩定，增益裕度12db，相位裕度大
於60度，姿態控制頻寬達80Hz，定位精度可達1.5μm，受到0.8g-0.1sec
干擾時，平台位移量小於20μm。

關鍵字

磁浮平臺 ； 定位系統

並列摘要

This Thesis describes the vertical mode control of the magnetic
suspended table ,including vertical position ,pitch and roll
attitude to satisfy the system specification in attitude
variation ,position accuracy and disturbance rejection .A
magnetic suspended table has been realized according t?*He
guide line of system engineering process ,from system
specification、preliminary design、detail design、fabrication、
assembling till testing for studying the theoretical and
hardware implementation of such a syst .The system includes six
major parts :permanent magnet、 electronic magnet、current
amplifier、eddy current displacement sensor、mechanical parts
and digital control processor .The permanent magnetic force
supports the major parts of table weight and variable reluctance
of electrical magnet control the position of a 6 kg table.
The multiple-input multiple-output vertical mode system is
decoupled into three independent subsystems thus simple lead
control laws can be applied .Each loop of the magnetic suspended
table may be stablized at the same time and satisfy the system
specification ,gain margin is 20db、phase margin is more than 60
degree、bandwidth of attitude control is 80 Hz，position
accuracy is 1.5μm，the table displacement is less than 20μm
under a 0.08g-sec impulse disturbance.

並列關鍵字

MAGNETIC SUSPENSION ； MAGNETIC LEVITATION ； POSITION CONTROL