延伸有限元素法(Extended Finite Element Method;XFEM)是由傳統有限元素法延伸而來,它延續了傳統有限元素法的優點,在模擬裂縫成長等不連續問題時,不需要明確定義裂縫表面且無須重新網格化,利用這種方法可以快速及精確的求得解析解。 本論文利用延伸有限元素法程式,模擬薄膜基材系統受到單軸拉伸後裂縫的應力分佈,並求得應力強度因子(stress intensity factor),將其結果與斷裂力學之解析解比較,並與其他例子驗證,確保程式的可信度;接著探討薄膜與基材受平均應力時裂縫是否會穩態的成長,與改變基材與薄膜材料的情況之下,對基材裂縫深度的影響,並用模擬方法計算出能量釋放率與理論值做比較。
The extended finite element method (XFEM)is extended from the conventional finite element method. In the simulation of crack growth, it does not need a clear definition of the fracture surface and does not have to be remeshed. In the present work, the extended finite element method is employed to simulate the propagation of a matrix crack in a thin film/substrate system subjected to uniaxial tensile stresses. The stress intensity factors are computed and compared with the results obtained by fracture mechanics. In addition, the crack propagation is simulated.