氧化鋅披護硫化鎘奈米線應用於高性能軟性光偵測元件

High Performance Flexible Photodetector Based on CdS Nanowires Coated with ZnO Overlayer

李季(Lee, Ji)

指導教授 ： 陳力俊

國立清華大學/工學院/材料科學工程學系/碩士(2021年)

摘要

現今的社會當中，軟性元件在學術界和業界都引起了極大的關注。為了適應在元件越做越小、性能越來越強的這個時代，擁有高彈性、高耐久度、性質優異的可靠元件是每個人共同追求的目標。軟性元件例如壓力感測器、彎曲感測器、光感測器、氣體感測器等等都有極高的需求。
而本次研究將會將目標放在製作出性能優秀的軟性光偵測元件。軟性光偵測元件可以被大量應用於現今的自駕車、無人機、穿戴式電子裝置之中。因此軟性光偵測器的可彎曲程度、耐久度、高靈敏性便成為重要的參考依據。
本研究將會將重點放在如何順利地利用簡單的化學氣相沉積製程來生長出硫化鎘奈米線，並且確認其物理、光電性質表現。此後利用氧化鋅生成type2的異質結構，並且利用簡單的轉移法將奈米線轉移至軟性的聚醯亞胺基板(PI)來形成金屬-半導體-金屬的光偵測器。光偵測器會在紅綠藍三種不同波段及不同強度下的光源下進行量測，並且軟性光偵測器的彎曲測試與耐久度測試都會被測試。
以結論來說，以硫化鎘為基底的軟性光偵測元件表現出優異的光感測開關特性和高元件反應速度。此外聚醯亞胺基板(PI)更是提供了優異的元件穩定度，在高彎曲角度與高彎曲次數下元件都保持良好的光偵測特性。這些結果都指出本研究合成的高質量硫化鎘奈米線與元件製作方法為實際應用於生活中帶來可能性。

關鍵字

光偵測 ； 可撓曲 ； 軟性元件 ； 奈米線

並列摘要

In recent years, flexible components have aroused great attention in both academia and industry. In order to adapt to this era of increasingly miniaturized components and stronger performance, it is prudent to fabricate reliable components with high elasticity, high durability, and excellent properties. Flexible components such as pressure sensors, bending sensors, photodetectors, gas sensors, etc. are in extremely high demand.
Flexible photodetectors have been widely used in today's self-driving vehicles, drones, and wearable electronic devices. The flexibility, reliability, and high sensitivity of the flexible light detection components are important criteria. The present work focused on the fabrication of flexible light detection components with excellent performance.
CdS nanowires have been successfully synthesized with a simple chemical vapor deposition process. Their physical and optical properties were characterized. Afterwards, zinc oxide was deposited on CdS nanowires to form a typeⅡ heterostructure, and a simple transfer method was applied to transfer the nanowires to a flexible PI substrate to form a metal-semiconductor-metal photodetector. The photodetector has been measured under light sources of different wavelengths and different intensities. The bending and reliability tests of the flexible photodetector were also carried out.
The CdS-based flexible photodetector exhibits excellent on-off photo-switching characteristics and high photo-response speed. In addition, the PI substrate provides excellent device stability, and the device maintains great performance under high bending angles and high bending cycles. These results indicate that the fabrication of flexible transparent photodetectors based on high-quality CdS-ZnO nanowires is very promising for practical applications in wearable devices.

並列關鍵字

photodetect ； flexible ； nanowires

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