雷射反射鏡之鍍膜技術研究

近年來雷射被廣泛使用在工業加工上，像是焊接、切割、鑽孔等應用，而為了要提升雷射在加工上的精度及速度，雷射振鏡掃描系統被用來輔助加工製程。在雙軸振鏡掃描系統中有兩片振鏡，其目的是為了將雷射轉向，而為了避免在轉向的過程中有過多的能量損失，因此振鏡就需要有高反射率。本論文的目的即是利用介電質材料來設計並且鍍製出高反射率的振鏡。本論文中使用薄膜設計軟體Essential Macleod，利用SiO2以及Ti3O5兩種材料做膜堆設計，並透過軟體中的優化功能來提升設計之鏡片反射率，使設計之振鏡在綠光區間內的反射率達到99%。完成振鏡膜層設計後，再利用本實驗室之多層膜光學鍍膜機去做振鏡鍍膜的流程，最後再將製作之振鏡成品透過光譜量測系統去量取振鏡的穿透與反射光譜圖，與設計結果比較，確認其規格是否符合設計目標，達到市售需求之規格。

關鍵字

振鏡掃描系統；介電質膜；高反射振鏡；光學鍍膜機

並列摘要

Nowadays, laser technology has been applied to many applications in industrial manufacture processes, such as welding, cutting, and drilling. To improve the processing speed and precision, laser galvanometer scanning system, generally based on two galvo mirrors, can control the laser beam aiming at work objects. Hence, it is important to increase the reflectivity of the galvo mirrors via the surface coatings for reduction in energy losses in the scanning system. In this thesis, the design of coatings on galvo mirrors employs Essential Macleod, a thin film design software copyrighted by Thin Film Center Inc. This design use Silicon dioxide(SiO2) and Trititanium pentoxide(Ti3O5) as materials, and with the function of optimization in the software, the reflectivity of galvo mirrors could approach 99% in 500~550nm. Next, an in-house vacuum coater, Made by Showa Zenko Co., conducts the coating process of galvo mirrors based on the design parameters. And, a spectrometer measures the reflectivity of coated galvo mirrors to give assessment of coating processes in order to make the design of coating parameters fulfill the specifications of the mirrors.