- 學位論文
半導體蝕刻製程專家系統之建構
Construction of an expert system for semiconductor etching process
摘要
台灣半導體晶圓代工製造產業在世界佔有率為第一，為維持高的產值及設備稼動率，工程師需面臨手機開機及隨時待命(On Call)的狀況，造成工作壓力的繁重及生活品質的下降，而製造製程上的需求，常常需要接觸到一些有害的化學藥品(如HF、H2SO4…)，增加工作上的風險，造成人力的流動率大，所以半導體製造廠常常面臨招募困難及人力短缺的問題，故當有新進同仁的加入，用人單位常常期望能儘快的做出貢獻，來減輕用人單位的負擔。 鑑於E公司蝕刻部門，內部教育訓練資源分散，未能有效的整合，常常造成新人學習的困擾，本研究試圖藉由專家系統資料庫的建構，來整合課內的資源，方便新進同仁學習，正確的處理異常產品。 本研究藉由Excel內所附VBA(Visual Basic for Applications)軟體來建構專家系統，整合用人單位(E公司蝕刻製程)處理異常產品的手法及經驗，當作系統的資料庫，並萃取專家(資深工程師)處理異常產品手法，建立專家知識法則，並採用知識法則庫，利用「若…則…」(If…Then…)架構來描述一個特定的狀態或因果的關係，來做為推論器之判斷標準，協助新進同仁處理異常產品，達到正確培養專業蝕刻製程新進同仁的目的，並且有效的保留資深工程師(專家)的異常產品處理手法，進而降低企業培訓成本及經驗流失風險的目標。 本研究的結果驗證，可以有更嚴謹的思考，提醒工程師做該做的檢查及確認，防止異常大量產出，在異常資料找尋上，更可以縮短時間，方便新進同仁使用，對於公司在培訓新進同仁，異常資料的整理及保存有相當的貢獻。 關鍵字:半導體製造、教育訓練、VBA軟體、專家系統、蝕刻製程。
並列摘要
The market share of Taiwan semiconductor manufacturing industry is in the first place in global. The production mode has to be continuously keeping high output value and equipment utilization. In this way, the engineers are requested to be on call at any time. Moreover, for the demand of process, the engineers have contact some noxious chemicals very often, such as HF, H2SO4 etc. It raises working risk and causes high labor turnover rate. Consequently, the company is often eager to expect a new employee could offer some contribution quickly to ease the department’s burden. As far as the etching department in E-company is concerned, the inner-training resources are gathered and integrated inefficiently. A new employee is often perplexed to learn. In order to let a new employee learns easy, This research attempts to combine the section’s resources and shorten the time of dealing with the abnormal products through developing the expert system. In this research a expert system is developed by the VBA (Visual Basic for Applications) software of Excel to achieve the goal of shortening a new ET/PE employee’s training time and retaining the experts’s (senior engineers’s) coping strategy with abnormal products. The expert system takes the etching department’s (ET/PE in E-company)documents of handing the abnormal products as the database, sets up the expert know-how rules by extracting the experts’s (senior engineers’s)experiences on dealing with the abnormal products, and by adopting If…Then… rule to be the determining standard of inference implement. The research results show, can be more rigorous thinking, reminding the engineers to do the right check and confirmation, to prevent abnormal large number of products. The exception data to search, That you can reduce the time and convenience for new employee to use. The new employee training and preventing these experiences losing have significant contributions for the enterprise. Keywords: Semiconductor manufacting, Training, VBA software, Expert system, Etching process engineering.