- 學位論文
折繞式光束整形應用於線型雷射加工與積層製造系統之研究
Application of Refractive/Diffractive Beam Shaping for Line Beam Laser Processing and Addictive Manufacturing System
若您是本文的作者，可授權文章由華藝線上圖書館中協助推廣。
摘要
光束整形即一種改變光束能量分佈的技術，隨著雷射應用範圍擴增，於特定應用上需將雷射能量由高斯分佈轉成均勻平頂分佈，包括雷射加工、半導體加工和醫療產業等。 線型雷射加工可用於大型面板及太陽能面板的退火加工，或是半導體製程的雷射掀離法上。多數線型雷射加工系統使用多模雷射搭配透鏡陣列獲致良好線均勻性，但用於單模(TEM00)雷射高同調光之干涉性會影響光之均勻性。本文透過MEMS蝕刻技術設計製作滾筒型一維反射式散射片，可解決單模雷射干涉性造成均勻性降低的問題，並加上透鏡陣列的折射式系統，將點光源雷射整形為線型均勻分佈光，均勻度可達90%。 積層製造的普及與成熟打破原本製造方式，廣泛應用於各領域中，對於尺寸要求也越高。目前精細度高的積層製造機台多使用雙光子吸收致聚合的方式結合高倍率物鏡，可以突破繞射極限，達到高精度目的。本計畫預計用兩個純相位的矽基液晶空間光調制器(LCoS)以繞射的方式，搭配電腦全像(CGH)術將高斯光源整型為平頂分佈的點光源，並將兩整束光源以部分疊合的方式來達到提升加工精度的目的。而後使用雙光子吸收致聚合的效應來固化液態高聚合物材料，以期達到小尺度製造上的要求。
並列摘要
Beam shaping is the technique to change the energy distribution of the light beam. With the increasing demands for the applications of laser, the Gaussian energy distribution laser needs to transfer to flat-top distribution in some applications, such as laser processing, semiconductor processing and laser medical treatments. The line beam laser processing could be used for the annealing processing of the flat panel display and the solar panel production, or laser lift-off in the semiconductor processing. Most of laser line beam processing systems use multi-mode laser along with lenslet array as the homogenizer to achieve good uniformity. However the high coherency of the signal mode laser generates the interference patterns, which deteriorate the uniformity of light. In the article, by using the etching technique of MEMS to design and fabricate the cylindrical one-dimension reflective diffuser, which could solve the coherency problem causing bad uniformity by the single mode laser. By combining the diffuser with the lenslet array refractive system we could transfer the point light source into the high homogeneity line beam. Addictive manufacturing which is popular and developed gives a new way for the manufacturing, and it is widely used in many areas. The demands for the dimension are more and more accuracy. The highest resolution addictive manufacturing systems commonly use two-photon polymerization (TPP) with a microscopic objective lens that could break through the diffraction limit. The article predicts to use the diffractive method that uses two phase type LCOS spatial light modulator along with the computer holograms to shape the Gaussian laser beam into the flat-top distribution point source. Then overlap parts of the two points to create a new point that could improve the processing size or accuracy. Besides, using TPP method solidifies the resin, and expects to reach the small dimension demands.
參考文獻
[60]林重勳，「以SU-8光阻製作之方型微流道內毛細填充現象研究」，中原大學，碩士論文，民國95年
[3]U. Umhofer, E. Jäger, and C. Bischoff, “Refractive and diffractive laser beam shaping optics,” Laser Technik Journal, vol. 8, issue 3, pp. 24–27, May 2011.
[4]M. R. Taghizadeh, P. Blair, K. Balluder, A. J. Waddie, P. Rudman, N. Ross, ‘‘Design and fabrication of diffractive elements for laser material processing applications,’’ Optics and Lasers in Engineering, vol. 34, pp. 289-307, Oct. 2000.
[6]N. Bokor, N. Davidson, “Anamorphic, adiabatic beam shaping of diffuse light using a tapered reflective tube,” Optics Communications, vol 201, issues 4-6, pp. 243-249, Jan. 2002.
[10]R. S. Nesbitt, S. L. Smith, R. A. Molnar, S. A. Benton, “Holographic recording using a digital micromirror device,” in Proc. SPIE, Practical Holography, vol. 3637, pp. 12-20, January 1999.