利用熱及磁致動器來實現光學對準的追蹤位移

Using Thermal and Magnetic Actuators to Achieve Tracking Displacement of the Optical Alignment

吳芊諭(Wu,Chien Yu)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2016年)

摘要

在光學對準平台領域中，市售之光學對準產品都是以機械封裝為主，然而此種封裝不僅錯位容忍度差、產率低，其尺寸大、成本高。為了有效解決此種問題，本文提出採用微機電製程技術製作一個以單晶矽微結構之微光學對準平台，採用自動化耦光封裝，不僅整合性高、錯位容忍度高，且其體積小，可降低生產成本。
本研究提出一種新式微光學對準平台，結合熱致動及磁致動之設計概念，配合適當的絕熱材料PDMS作為隔絕聯結之目的，以普及的矽基材製程加工及點膠方式製作本研究之微光學對準平台。研究中以有限元素分析軟體模擬不同元件之設計結構參數，得到致動器結構最佳化之趨勢。透過實際元件製作，以及量測致動器產生之位移量，除驗證本研究之概念設計具有可行性之外，亦可了解絕熱材料及致動器之性能，並針對其產生之問題加以修正及改進。
本研究提出光學對準平台具微小化、體積化、反應速度快、低能量消耗、及系統整合性高等優點。文末亦提出一些下一代微光學對準平台之設計理念，以期望得到更佳之微光學對準平台效能，及更寬廣之應用範圍。

關鍵字

微機電系統 ； 光學對準平台 ； 熱致動器 ； 磁致動器 ； PDMS

並列摘要

In the field of optical alignment platform, commercially available optical alignment of the products are mainly mechanical package, but this package is not only misplaced poor tolerance, but also low yield, large size and high cost. Effectively solving this problem, we propose the use of MEMS process technology to produce a micro-optical platform aligned by single-crystal silicon microstructures, the use of automated coupling light package, not only high integration, but also high misalignment tolerance, small size, and low production costs.
This study presents a novel micro optical alignment platform, combined with the thermal and magnetic actuator of the design concept, with appropriate insulation PDMS as an object of isolated coupling to the popularity of the silicon substrate processing production, processing and dispensing of the way research the micro-optical alignment platform. Research analog design parameters of the different elements of the structural finite element analysis software to give the best of the actuator structure induced trend. Through actual component production, measured the amount of displacement of the actuator to generate, in addition to proof the concept design of this study’s feasible, we can understand insulating material actuator, the performance, fix their problems and improve for it.
This study presents a miniaturized optical alignment stage, the volume of the reaction speed, low power consumption, and system integration advantages. End of the paper also proposes a number of next-generation micro-optical design of the alignment stage to expect a better alignment of the micro-optical platform performance, and a wider range of applications.

並列關鍵字

MEMS ； Optical alignment platform ； Thermal actuator ； Magnetic actuator ； PDMS

參考文獻

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