電容式觸覺感測器之空間解析度優化

Spatial Resolution Enhancement for Capacitive Tactile Sensor

劉健豪(Mochtar Chandra)

指導教授 ： 羅丞曜

國立清華大學/工學院/奈米工程與微系統研究所/碩士(2016年)

摘要

本論文提出了一種利用創新感測運算法減少感測單元內電容器，進而改良製成的電容式三維解析接觸感測器。本論文提出的兩種創新感測器模型可分別達到現有模型的至少兩倍及四倍三維解析度，接觸式感測器可分別測量三軸所受應力並全面運算施加在感測器表面360度的剪應力。本論文不僅提出感測運算法，感測元件的電極形狀亦經過研究並改良以取得有對稱x-y平面的三維解析度。除此之外，感測器使用彈性材料製成以模擬機器人觸碰感測時使用的仿真膚元件。為得知感測器的機械表現及電性反應，本研究並另外平行架設一模擬模形以測試多種負載下的表現。機械組成和製造產生的缺陷等眾多重要因素造成的角度運算誤差，已依循實驗脈絡歸納並整理，以期能製造出更優良並具有實現性的接觸感測器。

關鍵字

Tactile sensors ； Capacitive sensors ； Three-axial force ； Spatial resolution

並列摘要

An improved spatial resolution capacitive tactile sensor is achieved in this work by employing a novel detection algorithm, which reduces the uses of number of capacitors in one sensing unit. Two novel models are proposed and realized to at least double and quadruple the current spatial resolution. The tactile sensor could detect three-axial force and compute the complete 360° shear force angle that applied on the upper sensor surface. Not only the detection algorithm has been developed, the shape of the electrodes of the sensing elements has also been modified and studied to obtain a symmetry x-y spatial resolution. Furthermore, the sensor is fabricated using elastic materials to provide a skin-like device on robot’s tactile perception. A simulation model is built in parallel to understand the device mechanical behaviors and electrical responses under various loads. The angle calculation error by several important parameters such as mechanical properties and fabrication defect has also been comprehensively identified and discussed to produce a better yet realizable tactile sensor.

並列關鍵字

Tactile sensors ； Capacitive sensors ； Three-axial force ； Spatial resolution

參考文獻

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