玻璃微奈米結構壓印成型及應用之研究

The Study of Glass Micro/Nanostructure Formation by Imprinting Process

洪育民(Yu-Min Hung)

指導教授 ： 宋震國

國立清華大學/工學院/動力機械工程學系/博士(2009年)

https://doi.org/10.6843/NTHU.2009.00540

摘要

本文採用數值與理論方法進行玻璃壓印程序的研究，研究初步利用已知的文獻了解到玻璃的成份、性質、黏度及其機械性質。接著建構玻璃壓印於定溫下時物理模型。數值模擬採用有限元素分析軟體ANSYS Multiphysics 10及其141號流體元素建構模型，模具視為剛體，而玻璃受熱超過其玻璃轉溫度時被視為牛頓黏滯流體。於模擬條件下，壓印速度是主要的輸入參數，而模擬的結果如壓力場於各階段的變化、基材效應、溫度效應及模流形狀等都逐被一探討。

實驗部份是利用實驗室自製熱壓印設備，主要功能是提供定壓及定溫的壓印條件。本論文也成功地展示微、奈米光柵結構的壓印結果，其中填充率及玻璃的流體形狀利用場發射電子顯微鏡加以觀察，其結果和不同加工條件進行討論，如壓印溫度、保壓時間等，實驗和數值模擬結果有很好的一致性，並提供日後實驗上的一個準則。

玻璃壓印是一個實用且有潛力的製程於實務應用上，於實務應用上選擇光通訊中的多通道V型微結構製作，採用自製的熱壓設備及精密的量測儀器進行光通結構熱壓製作與尺寸量測，驗證出製作出高精度微結構的可行性，而最後是本文的結論及未來工作項目的討論。

關鍵字

熱壓印 ； 玻璃成型 ； 有限元素法 ； V型結構

並列摘要

This thesis presented a theoretical and experimental investigation for the glass imprinting process. The properties, such as composition, viscosity, mechanical strength, of various glass materials were first studied and cross-checked by a broad survey of existing literatures. Then, the physical model for the imprinting process, which features a mold pressed into glass flow at constant temperature, was constructed. The finite element software ANSYS Multiphysics 10.0 and 141 fluid square elements were used in the simulation, which assumed the mold to be rigid and the glass Newtonian flow. In the simulation, the mold imprinting velocity was the major input parameter, the following factors were studied: pressure evolution at various stages, substrate effect, temperature effect, size effect, and flow profile within mold cavity. The experiment was performed by using a labmade hot embossing apparatus, which possessed the functions such as temperature, force, imprinting process controls. In addition, fabrication of micro- and nano-scale silicon molds was illustrated as well. The glass profile and filling ratio in the cavity were observed with an FESEM, on the basis of which, we discussed the temperature, holding time, and pressure distribution. The experimental results were compared with simulation ones, good agreement between them illustrated the FEM simulation was correct and could be employed as guidelines for conducting experiments. The proposed glass imprinting process has potential to be employed in practice. The labmade hot embossing system with precision measurement equipment was used to verify the possibility of precision V-groove channels to support and align optical fibers in fiber array components of optical communication systems. Finally, conclusions were made and future work was pointed out.

並列關鍵字

hot embossing ； glass formation ； finite element method ； V-groove

參考文獻

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