The Study of Bio-Application Photo Detectors

生醫應用感測元件與感測電路架構之研究

黃健羽(Chien-Yu Huang)

指導教授 ： 金雅琴 ； 林崇榮

國立清華大學/電機資訊學院/電子工程研究所/碩士(2009年)

https://doi.org/10.6843/NTHU.2009.00682

摘要

本研究使用CMOS和LTPS的標準製程，設計開發整合主動操控光感測的像素，用於生醫檢定的應用。一般生醫檢測之發光反應的度較小，要有效分辨雜訊與反應訊號是很大的挑戰。在CMOS photo-sensing pixel，採用脈波頻率調變的架構，以獲得高解析度的電子訊號。在本研究中，波長555nm亮度為0.1LUX的光已經在0.35μm CMOS PFM電路順利偵測。利用LTPS製程下實際量測到P-I-N的暗電流和光電流，在波長為470nm照度為10LUX之光訊號下，採用PWM之像素設計可在時脈為250HZ下，有效測出發光反應。

關鍵字

光感測器 ； 畫素 ； 低溫多晶矽

並列摘要

The goal of this thesis is to develop photo-sensing array, achieving “ bio lab on IC” with CMOS circuit and LTPS panel respectively. To detect low light intensity, PFM (pulse frequency modulation) is a good solution. PWM(pulse width modulation) pixel is another way of extending pixel response resolution. In this work, 0.1LUX light with λ=555 is successfully detected by using PFM circuit realized by CMOS process. To implement the sensing array on LTPS panel, the dark current and photo response of P-I-N diode are analyzed of simulation results of PWM pixel designed to be realized by LTPS process show that 10LUX light can be successfully detect under a clock frequency of 250HZ.

並列關鍵字

photo detector ； DPS ； LTPS

參考文獻

[1] T Gregory Drummond, Michael G Hill and Jacqueline K Barton, “Electrochemical DNA sensors,” Nature Biotechnology 21, 1192 – 1199, 2003

[2] Helmy Eltoukhy, Khaled Salama and Abbas El Gamal, “A 0.18-um CMOS bioluminescence detection lab-on-chip,” IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 41, NO. 3, MARCH 2006

[3] Chen Xu, Jiong Li, Yijin Wang, Lu Cheng, Zuhong Lu, and Mansun Chan, “A CMOS-Compatible DNA Microarray Using Optical Detection Together With a Highly Sensitive Nanometallic Particle Protocol,” IEEE ELECTRON DEVICE LETTERS, VOL. 26, NO. 4, APRIL 2005

[5] Somashekar B. Prakash, Nicole M. Nelson, Alfred M. Haas, Victor Jeng and Pamela Abshire,”BioLabs-On-A-Chip: Monitoring Cells Using CMOS Biosensors,” Life Science Systems and Applications Workshop, 2006. P.1-2, 2006

[6] Babak Ziaie, Antonio Baldi, Ming Lei, Yuandong Gu and Ronald A. Siegel, “Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery,” Advanced Drug Delivery Reviews Volume 56, Issue 2, p.145-172, February 2004