本研究主要目的是在探討八吋半導體廠之乾蝕刻區設備工程師肌肉骨骼不適盛行狀況及人員心理壓力,並評估工程師作業流程及姿勢以探討其與肌肉骨骼不適的相關性,最後利用此評估結果做為改善肌肉骨骼不適之參考依據。 本研究以新竹科學園區某八吋半導體廠乾蝕刻區設備工程師共有60位男性為研究對象,研究方法共分成二個部分,第一部份進行主觀肌肉骨骼不適問卷調查與分析,以評估設備工程師肌肉骨骼不適的程度。問卷分為四部分,分別為個人背景資料、主要工作內容、肌肉骨骼不適自覺評量及心理社會因子評估。第二部分進行工作分析以OWAS姿勢分析法,利用DV拍攝現場作業方式進行分析,找出具有肌肉骨骼傷害風險的動作。 結果發現下背不適程度高於其他部位,心理社會因子中以工作內容的滿意度最低,工作負荷的壓力感受最高。變異數分析顯示半導體年資與年齡均對下背不適與心理社會因子造成顯著的影響。下背不適與年齡、半導體年資、88DD、85DD、ASPEN累積維修時間呈顯著正相關,DPS-GAT及DPS-METAL的累積維修時間則與工作壓力呈正顯著相關,工作滿意度呈顯著負相關。迴歸分析顯示主要造成下背不適的因子除了半導體年資外,88DD、85DD的累積維修時間亦會加重下背不適的程度。 人因分析顯示設備工程師下背不適情況相當高,其可能原因為受限於機台操作平台之尺寸、水平距離及高度,以不自然的姿勢(頭部前傾、彎腰、轉身等)進行機台保養、維修,在無法變更機台設計並在有限的資源下,建議在拿取、擺放工具或零件此項作業,設計一外加的工作平台,或改善零件相關設計,以降低此項作業所造成肌肉骨骼不適發生的危險性。
The purpose of this study is to evaluate the musculoskeletal discomfort problem for equipment engineers of dry etching department in a eight inch factory. Sixty male engineers participated in the questionnaires survey. The results showed that low back discomfort rate was reported to be higher than other body parts. Among the psychosocial factors, the satisfaction of job content was the lowest and the pressure of intensified workload was the highest. The ANOVA results showed that the work seniority and age had significant effect on low back discomfort and psychosocial factors. There were positive correlations between low back discomfort and work seniority, age, working experience on 88DD, 85DD or ASPEN equipment. Besides, working experience on DPS-GAT or DPS-METAL equipment had positive correlation with job stress, but it was negatively correlated with job satisfaction. The result of stepwise regression analysis showed the major factors associated with low back discomfort were work seniority and accumulated maintenance time of 88DD or 85DD. Further, ergonomic analysis was conducted to evaluate the maintenance task of 88DD and 85DD. Some improvements are recommended to reduce equipment engineers’ musculoskeletal discomfort problems.