半導體廠SEM作業員視覺疲勞之評估改善

Improving the Eye Fatigue Problem of SEM Operators in Semiconductor Industry

陳復生

指導教授 ： 王茂駿

國立清華大學/工學院/工業工程與工程管理學系工程碩士在職專班/碩士(2006年)

https://doi.org/10.6843/NTHU.2006.00299

摘要

在晶圓製造過程中，掃瞄式電子顯微鏡工作站(SEM)為主要晶圓檢測作業之一。由於SEM作業員需要長時間注視螢幕導致視覺疲勞的問題。本研究評估LCD螢幕尺寸(14吋、19吋)及晶圓有無鍍金對客觀視覺疲勞指標(NPA、CFF)、主觀視覺疲勞評比與作業績效的影響。本實驗共有12位SEM作業員參與並於無塵室中進行。實驗結果發現當晶圓樣本加以鍍金後有助於降低SEM作業對NPA閾值與CFF閾值的影響。使用19吋的LCD螢幕的情況下，除了能降低客觀視覺疲勞，更可降低主觀視覺疲勞程度及提升作業績效。因此建議使用19吋LCD螢幕及鍍金晶圓以改善作業員之視覺疲勞問題。

關鍵詞：掃瞄式電子顯微鏡、視覺疲勞、閃光融合閥值、近點調節值

關鍵字

掃瞄式電子顯微鏡 ； 視覺疲勞 ； 閃光融合閥值 ； 近點調節值

並列摘要

Scanning Electron Microscope (SEM) station is one of the main inspection tasks in the wafer manufacturing process. Because of searching on the screen for long time, SEM operators frequently complained about visual fatigue problems. In this study, we evaluated the effects of LCD monitor size (14 and 19 inch) and wafer coating condition (non-coating wafer and gold-coated wafer) on objective visual fatigue (NPA and CFF), subjective eye fatigue rating and task performance. Twelve SEM operators participated in this study and conducted the experiment in fab. The results indicate that the gold-coated wafer had significant reduction on NPA and CFF threshold change. Using a 19-inch LCD not only reduced objective visual fatigue but also reduced subjective eye fatigue and improved task performance. It is recommended to use a 19-inch LCD monitor and gold-coated wafer to improve SEM operators’ visual fatigue problems.

Keywords： Scanning Electron Microscope (SEM), eye fatigue, critical fusion frequency (CFF), near point accommodation (NPA)

並列關鍵字

Scanning Electron Microscope (SEM) ； eye fatigue ； critical fusion frequency (CFF) ； near point accommodation (NPA)

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