利用懸臂樑結構設計與製作之CMOS-MEMS微質量感測器

The Design and Fabrication of CMOS MEMS Mass Sensor Using Cantilever Beam Structure

李應崇(Ying-Chung Li)

指導教授 ： 盧向成

國立清華大學/電機資訊學院/電子工程研究所/碩士(2006年)

https://doi.org/10.6843/NTHU.2006.00354

摘要

無資料

關鍵字

微質量感測器 ； 懸臂樑 ； 電容式感測

並列摘要

無資料

並列關鍵字

Capacitive sensing ； CMOS MEMS ； Cantilevers ； Mass sensor

參考文獻

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[21] Z. J. David et al., ” Fabrication and characterization of nanoresonating devices for mass detection,” J. Vac. Sci. Technol. B, vol. 18, no. 2,p.612-616, Mar/Apr 2000

[24] Hayato SONE, Haruki OKANO, Sumio HOSAKA,” Picogram Mass Sensor Using Piezoresistive Cantilever for Biosensor”, Japanese Journal of Applied Physics , vol. 43, vo. 7B, 2004, pp. 4663–4666

[25] Vittorio Ferrari, Daniele Marioli, Andrea Taroni, Elisabetta Ranucci, and Paolo Ferruti,” Development land Application of Mass Sensors Based on Flexural Resonances in Alumina Beams”, IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, vol. 43, no. 4, July 1996