摻雜氧對於奈米晶氮氧化鈦薄膜結構與性質之影響

Oxygen Doping on the Structure and Properties of Nanocrystalline Ti(N,O) Thin Film

邱上睿(Shang-Jui Chiu)

指導教授 ： 喻冀平 ； 黃嘉宏

國立清華大學/原子科學院/工程與系統科學系/碩士(2006年)

https://doi.org/10.6843/NTHU.2006.00540

摘要

本研究成功的利用非平衡式磁控濺鍍法於350℃溫度下通入氧氣與氮氣鍍著出奈米晶氮氧化鈦薄膜於304不?袗?上。在研究中，主要探討改變氧氣流量對氮化鈦薄膜之組成、結構、性質以及腐蝕抗性的研究。從XPS及XRD的結果中我們發現了試片由TiN結構轉換成Ti3O5結構的取代現象。而由XRD圖我們發現了織構轉換的現象：由一開始的隨機分佈轉換成的(111)優選方向，而後又轉變成(200)優選方向。織構轉換是因為氧原子附著於TiN(200)面上阻止Ti原子移動至(111)面。轉換的成因是氧氣解離並阻礙Ti原子的移動。薄膜的硬度測量值可能受到膜與基材的附著力之影響。殘留應力可能受到薄膜當中非晶相的影響而對於氧含量的趨勢不明顯。硫酸動態極化的掃瞄結果顯示Ti3O5結構對於薄膜腐蝕抗性有著重要的影響，有著較高堆積密度之薄膜會有較好的腐蝕抗性。薄膜的顏色隨著氧含量由暖金色轉變成綠色，最後則變成粉紅色。顏色改變是因為試片中氮與氧原子會影響到TiN結構的可躍遷至導帶的自由電子數。

關鍵字

氮氧化鈦 ； 氧氣流量 ； 織構 ； 顏色

並列摘要

Nano-crystalline Ti(N,O) films were successfully deposited on AISI 304 stainless steel substrates using unbalanced magnetron sputtering (UBM) system with addition of oxygen and nitrogen at 350℃. The effect of oxygen flow rate was investigated on the composition, microstructure and properties of Ti(N,O) thin films. From X-ray photoelectron spectroscopy (XPS) and XRD results, phase transformation of TiN phase displaced by Ti3O5 phase was observed. The diffraction patterns of XRD revealed that the texture evaluation from random distribution to (111) preferred orientation and then to (200) texture structure occurred at the oxygen content ranging from 4 to 5 at % and 5 to 23 at %. It was resulted from hindering of Ti adatoms by oxygen atoms stuck on (200) plane of TiN phase. The measured film hardness could be influenced by adhesion between the substrate and the films. Residual stress does not have clear trend with the oxygen content of films due to the possible effect of amorphous phase in the films. The results of potentiodynamic polarization test in 0.5M H2SO4 + 0.05M KSCN solution showed that Ti3O5 phase would affect the corrosion behavior. With higher packing density, Ti(N,O) thin films showed better corrosion resistance in H2SO4 solution. The results showed that the film coloration changes from warmer golden to vivid green and then to pink because N/Ti ratio influenced the free d electrons from Ti atoms and the number of free d electrons available for conductivity changes.

並列關鍵字

Ti(N,O) ； oxygen flow rate ； texture ； color